Microhollow cathode discharges

Schoenbach, K.H.; Moselhy, M.; Shi, Wenhui; Bentley, Roger

doi:10.1116/1.1565154

Cited by 79 publications

(62 citation statements)

References 33 publications

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“…[51] MHCDs are DC glow discharges sustained between two parallel metal electrodes with a center opening of diameter 0.1 mm in either the cathode, or the cathode and the anode. [30,31] The electrodes are separated by a gap of 0.2± 0.4 mm, which is often filled with a dielectric material.…”

Section: ±1mentioning

confidence: 99%

Atmospheric Plasma Deposition of Coatings Using a Capacitive Discharge Source

Moravej

Hicks

2005

Chemical Vapor Deposition

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In this paper, a review is provided of the plasma-enhanced (PE)CVD of thin films using an atmospheric-pressure (AP) capacitive discharge source. This source is unique in that the organometallic precursors are fed downstream of the plasma, where reactions occur exclusively between neutral molecules, radicals, and the substrate surface. As a result, the properties of the films differ from those obtained in low-pressure (<1 torr) gas discharges. For example, glass may be deposited on plastic with no carbon contamination and less than 15 mol-% hydroxyl groups, yielding material with good scratch protection. Silicon nitride and amorphous hydrogenated silicon films have also been prepared by AP-PECVD. These material processes further illustrate the unique attributes of this new deposition technology.

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Section: ±1mentioning

confidence: 99%

Atmospheric Plasma Deposition of Coatings Using a Capacitive Discharge Source

Moravej

Hicks

2005

Chemical Vapor Deposition

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“…Following Schoenbach group studies about microdischarges -notably of microhollow cathode discharges (MHCD) at moderate to atmospheric pressure -the operation and applications of these kinds of microplasmas has attracted the attention of researchers worldwide due to the convenience and easiness of operation, besides the low cost [1][2][3][4][5][6][7][8][9][10]. These non-thermal microplasmas, where the electron temperature is much higher than the gas temperature (here, electron temperature is associated with the mean electron energy), allied to small size and low power consumption, is an attractive to the plasma applications possibilities in industry, like surface treatment, generation of UV and VUV radiation, reduction of pollutants, gas lasers, biological decontamination, thin film deposition, mainly in a high pressure operation [1,2].…”

Section: Introductionmentioning

confidence: 99%

Optical and electrical diagnostics of microdischarges at moderate to high pressure in argon

Sismanoglu¹,

Cunha²,

Gomes³

et al. 2010

Braz. J. Phys.

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Microdischarges at moderate to high pressure in argon were investigated. A hole opening diameter of 500 µm direct current (dc) microhollow cathode discharges (MHCD) were characterized by electrical measurements and optical emission spectroscopy (OES) for pressures ranging between 90 and 800 Torr and current from 5 to 20 mA. Current-voltage characteristic curves were obtained as a function of the pressure for this hole diameter. MHCD enables stable dc discharges for molybdenum electrodes material at constant Ar + 2%H 2 flow of 0.03 /min. Optical emission spectroscopy and analysis of the spectral line broadening of plasma line emissions were performed in order to measure gas discharge parameters. Electron number densities were obtained from H β Balmer line (∼ 10 14 cm −3 ). For the above mentioned discharge conditions, gas temperature was estimated to be 550 -850 K from OH rotational bands. Excitation temperature was measured based on two lines method (from atomic Mo lines) and from 4p -4s and 5p -4s Ar radiative transitions. Hydrogen atom temperature was measured for 800 Torr (∼ 12000 K).

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“…1 In this work, we describe a approach for treating smalldiameter polymer tubing and we make use of two microplasma diagnostics to monitor the plasma properties during the treatment process. The microplasma, which extends along the entire length of the tubing, is created with hollow cathode (HC) electrodes [37][38][39] which are placed in vacuum at each end of the PE tubing. This discharge configuration has many advantages compared to previous techniques.…”

Section: Introductionmentioning

confidence: 99%

Reduced adhesion of human blood platelets to polyethylene tubing by microplasma surface modification

Lauer

Shohet

Albrecht

et al. 2004

Journal of Applied Physics

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A hollow-cathode microplasma modified the lumenal surface of small-diameter polyethylene (PE) tubing. A microwave cavity diagnostic was used to measure the density of the microplasma. Plasma light output was observed with a monochromator at various positions along the PE tube to assess uniformity. Treatment effectiveness was evaluated by measuring the variation in capillary rise at various positions along the tubing. A correlation between the properties of the inner surface of the PE tubing and the emitted light intensity was found. A poly(ethylene oxide) surfactant was immobilized to the lumenal surface of the PE tubing with an argon microplasma discharge. To test hematocompatibility, an in vitro blood-flow loop circulated heparinized human blood through both a plasma-treated and -untreated PE tubes, simultaneously. After blood exposure, the tubes were examined with a scanning electron microscope to assess the density of adhering platelets along the length of the tubes. By modifying the plasma parameters, the uniformity of the microplasma treatment along the tubing can be optimized.

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Microhollow cathode discharges

Abstract: Articles you may be interested in A global model of the self-pulsing regime of micro-hollow cathode discharges

Cited by 79 publications

References 33 publications

Atmospheric Plasma Deposition of Coatings Using a Capacitive Discharge Source

Atmospheric Plasma Deposition of Coatings Using a Capacitive Discharge Source

Optical and electrical diagnostics of microdischarges at moderate to high pressure in argon

Reduced adhesion of human blood platelets to polyethylene tubing by microplasma surface modification

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