Microlens array fabrication on fused silica influenced by NIR laser

Kostyuk, G. K.; Zakoldaev, R. A.; Sergeev, M. M.; Yakovlev, E. B.

doi:10.1007/s00340-016-6379-y

Cited by 10 publications

(6 citation statements)

References 66 publications

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“…The fill factor of the MLA reached 99% (Deng et al, 2015). Kostyuk presented a method of MLAs formation on the fused silica surfaces by the irradiation of ytterbium fiber laser (Kostyuk, Zakoldaev, Sergeev, & Yakovlev, 2016). Hua et al employed a femtosecond laser to produce convex silica microlens arrays.…”

Section: Materials For Microlenses Fabricationmentioning

confidence: 99%

Microlenses arrays: Fabrication, materials, and applications

Cai

Sun

Chu

et al. 2021

Microscopy Res & Technique

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Microlenses have become an indispensable optical element in many optical systems. The advancement of technology has led to a wider variety of microlenses fabrication methods, but these methods suffer from, more or less, some limitations. In this article, we review the manufacturing technology of microlenses from the direct and indirect perspectives. First, we present several fabrication methods and their advantages and disadvantages are discussed. Then, we discuss the commonly used materials for fabricating microlenses and the applications of microlenses in various fields. Finally, we point out the prospects for the future development of microlenses and their fabrication methods.

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Section: Materials For Microlenses Fabricationmentioning

confidence: 99%

Microlenses arrays: Fabrication, materials, and applications

Cai

Sun

Chu

et al. 2021

Microscopy Res & Technique

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“…The most popular technologies are laser-induced backside wet etching (LIBWE) [16,[19][20][21][22], laser-induced backside dry etching (LIBDE) [17,18,23], laser induced plasma assisted ablation (LIPAA) [24][25][26], and lased-induced black-body heating (LIBBH). The last one has been developed at Laser Technology Department of ITMO University [27][28][29][30][31]. Various arrays of microoptical elements formed on fused silica surface according to this technology include random phase plates [27], sinusoidal diffractive gratings [27,29,30], and MLAs [29,31].…”

Section: ключевые слова: Fused Silica Microstructuring Microlens Arrmentioning

confidence: 99%

“…The last one has been developed at Laser Technology Department of ITMO University [27][28][29][30][31]. Various arrays of microoptical elements formed on fused silica surface according to this technology include random phase plates [27], sinusoidal diffractive gratings [27,29,30], and MLAs [29,31]. It is important to note that the square of the arrays may be high (up to 100 mm…”

Section: ключевые слова: Fused Silica Microstructuring Microlens Arrmentioning

confidence: 99%

Microlens array fabrication on fused silica by LIBBH technology with CO2 laser smoothing

Zakoldaev¹,

Kostyuk²,

Koval³

et al. 2016

Izv. vysš. učebn. zaved., Priborostr.

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A new technology for microlens array fabrication is presented. The technology is based on creation of the initial microstructures on fused silica by laser indirect method, and the following reflow process of these structures made by CO 2 laser action. Microlens arrays with diameter of microlens equal to 150 µm are fabricated. The focal length of microlens varies from 5 up to 5 mm. Profiles of formed microlens correspond to circle equation. Ключевые слова: fused silica microstructuring, microlens array, LIBBH, CO 2 laserIntroduction. At present different arrays of microoptical elements are traditionally used for transformation and processing of optical signals, for fiber-optical connections and integrated optical control systems [1] as well as to transform of intensity distribution in laser technology [2,3]. As the array of microoptical elements means a set of modified regions, located in a certain order on glass surface [2,4] and can be called microlens array (MLA). Such MLAs have a special arrangement and a given filling rate within the array, all these specifications depend on the problem to be solved with the final array.Not only optical-physical specific requirements are imposed on MLA in particular application, but also requirements on the surface quality in general. Particular attention is paid to the fabrication of MLAs on materials of traditional optics as silicate glass [5]. Thus, the developers' preferences are given to fused silica, which can be characterized by high light transmittance in wavelength range of 200-2500 nm and high chemical, thermal, and radiation resistance [6].Among the traditional technologies of MLAs fabrication on glass surface, the best known technologies are: photolithography [7], ion etching [8], hot embossing process [9], and so on. These technologies can be characterized not only by high quality of fabricated MLAs and high reproducibility, but also use multistage processing; manufacturing of MLAs with low numerical aperture (NA) presents difficulties when the technology is employed [7]. Currently, great attention is paid to MLAs fabrication with the usage of laser technology. It is also called as direct laser beam writing, which is based on strong absorption of CO 2 laser radiation [10], UV radiation [11] by glass , or on interaction with ultrashort laser pulses [12].Combined laser-induced technologies based on strong absorption of laser radiation by inorganic [13,14] or organic [15,16] solutions and metals [17,18] contact with the back side of the glass plate are widely spread today. The most popular technologies are laser-induced backside wet etching (LIBWE) [16,[19][20][21][22], laser-induced backside dry etching (LIBDE) [17,18,23], laser induced plasma assisted ablation (LIPAA) [24][25][26], and lased-induced black-body heating (LIBBH). The last one has been developed at Laser Technology Department of ITMO University [27][28][29][30][31]. Various arrays of microoptical elements formed on fused silica surface according to this technology include random phase plates [27], si...

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“…The traditional fabrication methods of MLA are the thermal reflow technique [ 11 , 12 ], laser direct writing (LDW) [ 13 , 14 , 15 , 16 ], 3D printing [ 17 , 18 ], and ion irradiation [ 19 , 20 ]. Thermal reflow technology is an effective method of preparing MLA.…”

Section: Introductionmentioning

confidence: 99%

“…Kostyuk, G.K. proposed using laser-induced blackbody heating to rapidly heat the graphite surface to the evaporation temperature to release plasma graphite particles. These particles promote the rapid heating of molten quartz to the melting temperature, thereby changing the glass relief [ 14 ]. In addition, Lin, C.H.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Multifocal Microlens Array by One Step Exposure Process

Wei

Cai

et al. 2021

Micromachines

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Microlenses can be widely used in integrated micro-optical systems. However, in some special applications, such as light field imaging systems, multifocal microlens arrays (MLA) are expected to improve imaging resolution. For the fabrication of multifocal MLA, the traditional fabrication method is no longer applicable. To solve this problem, a fabrication method of multifocal MLA by a one step exposure process is proposed. Through the analyses and research of photoresist AZ9260, the nonlinear relationship between exposure dose and exposure depth is established. In the design of the mask, the mask pattern is corrected according to the nonlinear relationship to obtain the final mask. The continuous surface of the multifocal MLA is fabricated by the mask moving exposure. The experimental results show that the prepared multifocal MLA has high filling factor and surface fidelity. What is more, this method is simple and efficient to use in practical applications.

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Microlens array fabrication on fused silica influenced by NIR laser

Cited by 10 publications

References 66 publications

Microlenses arrays: Fabrication, materials, and applications

Microlenses arrays: Fabrication, materials, and applications

Microlens array fabrication on fused silica by LIBBH technology with CO2 laser smoothing

Fabrication of Multifocal Microlens Array by One Step Exposure Process

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