Micromachined Clark oxygen electrode

Fabrication of miniature Clark oxygen sensor integrated with microstructure

“…Among the various tools to determine oxygen, the Clark-type oxygen sensor is the most widely used and has been applied in clinical analysis, fermentation monitoring, and biosensor development [1]. In the past two decades, owing to the progress in semiconductor and micromachining techniques, various types of miniature Clark-type oxygen sensors have been proposed [2][3][4][5][6][7][8][9][10][11][12]. It is necessary to consider the following aspects for fabricating a reliable sensor: (1) the fabrication and configuration of electrochemical electrodes in order to reduce the electrochemical crosstalk between different electrodes, (2) miniaturization techniques of the reference electrode for a longer lifetime and a more stable potential, (3) fixation and characteristics of internal electrolyte using different hydrogels or various types of electrolytes, and (4) bonding strategies and durability of the oxygen-permeable membrane and the detector substrate.…”

“…It is necessary to consider the following aspects for fabricating a reliable sensor: (1) the fabrication and configuration of electrochemical electrodes in order to reduce the electrochemical crosstalk between different electrodes, (2) miniaturization techniques of the reference electrode for a longer lifetime and a more stable potential, (3) fixation and characteristics of internal electrolyte using different hydrogels or various types of electrolytes, and (4) bonding strategies and durability of the oxygen-permeable membrane and the detector substrate. Suzuki and coworkers have significantly improved the above aspects [3][4][5][6][7][8][9][10][11] and employed the sensors practically in biological measurements [12][13][14].…”

On-chip microelectrodes for electrochemistry with moveable PPy bilayer actuators as working electrodes

“…We want to find out which ratio of the areas gives the optimal performance of the microelectrodes/microactuators, and whether the electrode configuration influences their performance. Several micro-electrochemical cells have been presented in the literature [21,24,25], but with little evaluation of alternative electrode lay-outs.…”

Carbon dioxide and oxygen gas sensors-possible application for monitoring quality, freshness, and safety of agricultural and food products with emphasis on importance of analytical signals and their transformation

“…It is reported that a good linear calibration curve is obtained. The oxygen electrode is stable during 10 h of operation, and the electrode lifetime can be extended to 30 h by converting the electrolyte solution to a gel form (Suzuki et al, 1993). Solid-state oxygen sensors.…”