Micromachined coplanar waveguides on thin HMDSN-membranes

Duwe, K.; Hirsch, Stefanie; Judaschke, R.; Müller, Jörg

doi:10.1109/icimw.2000.893040

Cited by 10 publications

(5 citation statements)

References 3 publications

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“…The membrane thickness is approximately 4 m. To realize the freestanding HMDSN membrane, the underlying silicon is removed in 40% KOH-solution. The complete fabrication process of membrane-based circuits is reported in [10]. The tripler chip shown in Fig.…”

Section: Frequency Tripler Design Fabrication and Measurementsmentioning

confidence: 99%

“…4 can be divided in five building blocks. A rectangular waveguide-CPW transition ( -band, WR06) consists of a triangular-shaped microstrip probe followed by a Klopfenstein taper to the coplanar waveguide [10]. To achieve matching, the rectangular waveguide is shorted by a tunable backshort in a distance of a quarter wavelength from the probe.…”

Section: Frequency Tripler Design Fabrication and Measurementsmentioning

confidence: 99%

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High-performance 450-GHz GaAs-based heterostructure barrier varactor tripler

Sağlam

Schümann

Duwe

et al. 2003

IEEE Electron Device Lett.

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In this letter, we report on the record performance of GaAs-based heterostructure barrier varactors (HBVs) in tripler circuits. Both fabrication technique of planar Al 0 7 Ga 0 3 As/GaAs heterostructure barrier varactors (HBVs) and measurements of a corresponding tripler circuit are presented. Planar transmission lines on a thin dielectric membrane and flip-chip technique without air bridges provide reduced parasitic losses and, hence, higher tripler efficiency. Frequency tripler measurements have shown more than 1 mW at 450 GHz.Index Terms-Frequency tripler, heterostructure barrier varactor (HBV), THz-technology.

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Section: Frequency Tripler Design Fabrication and Measurementsmentioning

confidence: 99%

Section: Frequency Tripler Design Fabrication and Measurementsmentioning

confidence: 99%

High-performance 450-GHz GaAs-based heterostructure barrier varactor tripler

Sağlam

Schümann

Duwe

et al. 2003

IEEE Electron Device Lett.

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“…The coupling between the diodes is realized using a resonant structure. The diodes are mounted in planar waveguides on 4 vm thin dielectric membranes, made from Hexamethyldisilazan (HMDS-N) [5], [6], [7]. Using coplanar waveguides (CPWs) based on these membranes, low losses are ensured.…”

Section: Design Considerations For a Spmmentioning

confidence: 99%

A Subharmonically Pumped Mixer in the Submillimeter Wave Range Using Single Diode Mixers and a Quasi-Optical LO Feeding Network

Mullerwiebus

Schünemann

2006

2006 European Microwave Conference

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The design of a subharmonically pumped mixer in the submillimeter wave range is discussed, in which several single diode mixers are used. An important design criterion is the rnmembrane separate biasing of each single diode mixer. A distribution structure for the RF signal is given that avoids power splitting. resonantThe feeding network of the LO frequency was assembled at u-ur 150 GHz. Preliminary measurement results are presented, inw which the required phase shifts between the beams of the LO membranie signal have been achieved. Practical misalignments of X/10 in the t 2 quasi-optical LO network are found to be negligible.

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“…Due to mechanical failure of some of the probing regions during the initial TRL calibration procedure, a full calibration could not be performed. The original motivation for fabricating the probing pads on a region of thickened membrane as opposed to bulk material was to avoid substrate modes which, as documented in [17,[36][37][38][39][40], threaten the repeatability of a TRL calibration.…”

Section: High-frequency Measurement Of Fabricated Linesmentioning

confidence: 99%

Design and Simulation of Membrane Supported Transmission Lines for Interconnects in a Mm-Wave Multichip Module

Farrington¹,

Iezekiel²

2011

PIER B

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Abstract-Investigations are conducted into low-loss, low-dispersion fully shielded membrane-supported striplines designed for use in a millimeter-wave multi-chip-module. Two types of transmission line are studied: a membrane-supported shielded stripline and a novel variation of this where the membrane material is removed in areas of little mechanical importance to reduce attenuation and dispersion. The latter is possible through the exploitation of a versatile micromachining technique using SU-8 for both the membrane and the shielding. The micromachining techniques used for the fabrication of the microshielding allows for the conformal packaging of lines and devices, with the ultimate aim of the realization of novel components for 3D system-in-a-package type modules. Extensive simulated results obtained from rigorous electromagnetic modeling are presented that fully characterize both types of line and, where possible, are compared to measured results. Loss mechanisms are investigated for both line types and simulations suggest that losses as low as 0.39 dB/cm and effective relative permittivities of less than 1.05 are possible at a frequency of 100 GHz, comparing well with other demonstrated membrane supported transmission lines. The methods used for investigation of line characteristics and analysis of single-mode, nonleaky frequency range are applicable to any variety of membrane supported transmission line. The basics of line fabrication are given along with measurement results and de-embedding techniques used at V-band.

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Micromachined coplanar waveguides on thin HMDSN-membranes

Cited by 10 publications

References 3 publications

High-performance 450-GHz GaAs-based heterostructure barrier varactor tripler

High-performance 450-GHz GaAs-based heterostructure barrier varactor tripler

A Subharmonically Pumped Mixer in the Submillimeter Wave Range Using Single Diode Mixers and a Quasi-Optical LO Feeding Network

Design and Simulation of Membrane Supported Transmission Lines for Interconnects in a Mm-Wave Multichip Module

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