Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

Research development of silicon MEMS gyroscopes: a review

“…Quality factor of the drive mode is 67,000 and 125,000 for the sense-mode. In 2011, Trusov et al (2011) reported another new dual mass vibratory MEMS z-axis rate gyroscope that provided the improved ordering of the mechanical vibratory modes. At the same time, it also offered the more complete schemes of calculation and realization.…”

Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

“…In summary, influencing factors on damping losses can contribute to three aspects: vacuum packaging technology, materials properties, and mechanical structure topology. First, vacuum packaging scheme as the 2 Shock and Vibration most common one is used to greatly decrease air damping, such as epi-seal encapsulation process [20][21][22][23][24][25], hermetic lid sealing process [13,[26][27][28], Through-Silicon Via (TSV) process [29,30], and SPIL MEMS WLP process [31]. Second, some different kinds of materials are tried to yield lower the thermoelastic, surface deflect, and Akhiezer damping.…”

Improvement of Tuning Fork Gyroscope Drive-mode Oscillation Matched using a Differential Driving Suspension Frame

“…The article points out three major causes of error that arise from capacitive nonlinearity at the sense electrode, asymmetric electrostatic forces along sense direction at the drive electrodes and asymmetric electrostatic forces along drive direction at the drive electrodes. Reference [14] utilizes symmetrically decoupled tines with drive-mode synchronization and sense-mode coupling structures. The levered drive-mode mechanism structurally forces the anti-parallel, antiphase drive-mode motion and eliminates the lower frequency spurious mode presented in conventional IJECE ISSN: 2088-8708 …”