Micromachined rectangular-coaxial transmission lines

Abstract

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A 55 GHz Bandpass Filter Realized With Integrated TEM Transmission Lines

“…The advent of three dimensional micromachining processes over the past decade has opened up the potential for integrated rectangular coaxial (recta-coax) lines and striplines [1]. These processes allow the precise physical realization of the design models used for finite element simulations.…”

“…However, with low-loss metalizations, currently available fabrication processes can yield integrated coaxial resonators with quality factors in excess of 200 at 30 GHz [1]. It is therefore possible to realize low loss integrated filters in a very compact space.…”

A 6-Port 60 GHz Coupler for an RN2 Beam Former

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Micromachined H-plane horn antenna manufactured using thick SU-8 photoresist

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