Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

Li, Junhong; Wang, Cheng-Hao; Ma, Jun; Liu, Mengwei

doi:10.1007/s00542-012-1719-2

Cited by 9 publications

(3 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Besides the simulation results, the increase of receive and transmit sensitivity can also be attributed to the piezoelectric property diversity of ZnO film on different wafers and the fact that etching of a partial piezoelectric film can decrease the residual stress ignored in the FEM analysis. The receive and transmit sensitivity of the pMUT with partially-etched ZnO films are comparable to those based on PZT films that have better piezoelectric performance than ZnO [ 41 ], which indicates the structure of partially-etched piezoelectric films can significantly improve the sensitivity.…”

Section: Resultsmentioning

confidence: 99%

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Ren

Fan

et al. 2017

Sensors

Self Cite

View full text Add to dashboard Cite

A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counteraction of stress in the centre and edges. In order to further improve the sensitivity; a pMUT with partially-etched piezoelectric film was adopted. The receive and transmit sensitivities of the pMUT were analyzed in details. The receive sensitivity of pMUT with partially-etched ZnO film is 3.3 dB or 6.8 dB higher than those with a centric and whole electrode, respectively; and the amplitude of a partially-etched ZnO film pMUT under a certain voltage is 5.5 dB and 30 dB higher than those with centric and whole electrode separately. Two pMUT-based ZnO films were fabricated by micromachining technology and their receive and transmit sensitivities were tested. The ZnO films deposited by direct current (DC) magnetron sputtering exhibit a densely packed structure with columnar crystallites. The test results show that the structure of the square diaphragm with partially-etched piezoelectric layer can significantly improve the transducer sensitivity. The receive sensitivity and transmit sensitivity are −238.35 dB (ref. 1 V/μPa) and 150.42 dB (ref. 1 μPa/V); respectively.

show abstract

Section: Resultsmentioning

confidence: 99%

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Ren

Fan

et al. 2017

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…Although semiconductor devices such as light-emitting diodes, solar cells and transistors have received much attention, application requirements often demand co-integration of other types of active materials and classes of components. Lead zirconate titanate (PbZr 0.52 Ti 0.48 O 3 , PZT), as one example, is a ferroelectric/piezoelectric material for ultrasonic transducers 10 , microelectromechanical devices and actuators 11 , as well as pressure 12 and strain 13 sensors, owing to its large piezoelectric and electromechanical coupling coefficients, high dielectric permittivity and significant remnant polarization 14 . Force sensing, mechanical energy harvesting and actuation represent promising possible roles in stretchable systems that interface with the body.…”

mentioning

confidence: 99%

Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

et al. 2014

View full text Add to dashboard Cite

The ability to measure subtle changes in arterial pressure using devices mounted on the skin can be valuable for monitoring vital signs in emergency care, detecting the early onset of cardiovascular disease and continuously assessing health status. Conventional technologies are well suited for use in traditional clinical settings, but cannot be easily adapted for sustained use during daily activities. Here we introduce a conformal device that avoids these limitations. Ultrathin inorganic piezoelectric and semiconductor materials on elastomer substrates enable amplified, low hysteresis measurements of pressure on the skin, with high levels of sensitivity (B0.005 Pa) and fast response times (B0.1 ms). Experimental and theoretical studies reveal enhanced piezoelectric responses in lead zirconate titanate that follow from integration on soft supports as well as engineering behaviours of the associated devices. Calibrated measurements of pressure variations of blood flow in near-surface arteries demonstrate capabilities for measuring radial artery augmentation index and pulse pressure velocity.

show abstract

“…A wide variety of preparation techniques have been employed to produce thin films such as pulsed laser deposition (PLD), metal organic vapor deposition (MOCVD), sputtering, hydrothermal method, metal-organic decomposition (MOD) and sol-gel. Among these methods, the sol-gel method offers numerous advantages such as easier controlling of chemical composition, lower processing temperature, better compatibility with IC processing, easier fabrication of large area high quality films and lower cost [8,9]. At the same time, the production of the thin films is particularly important as they have several key advantages over bulk ceramics that include lower driving voltage and device dimensions as well as easier integration into electronic circuits [10].…”

Section: Introductionmentioning

confidence: 99%

Study of (111)-oriented PZT thin films prepared by a modified sol–gel method

Xiao

Lei

2015

J Mater Sci: Mater Electron

View full text Add to dashboard Cite

In this paper, Pb(Zr 0.52 Ti 0.48 )O 3 thin films were successfully deposited on platinized silicon substrates and silicon substrates with PbTiO 3 seed layer by a modified sol-gel processing. The results show that the films were more likely to grow on platinum substrate, and the PbTiO 3 seed layer promoted the grain growth and influenced the crystal orientation of the films. With the annealing temperature and sintering time rising (from 600°C for 1 h to 700°C for 2 h) in the new method, the crystal orientation of PZT deposited on Pt substrate with PbTiO 3 seed layer changed from (100) to (111), and the grain size increased from dozens to hundreds of nanometer. Meanwhile, its ferroelectric and dielectric properties were greatly improved with 2P r from 10.78 to 42.12 lC/cm 2 and e r from 348 to 978, respectively.

show abstract

Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

Cited by 9 publications

References 12 publications

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

Study of (111)-oriented PZT thin films prepared by a modified sol–gel method

Contact Info

Product

Resources

About