Micromachining applications of a high resolution ultrathick photoresist

Lee, K. Y.; LaBianca, N.; Rishton, S. A.; Zolgharnain, S.; Gelorme, Jeffrey D.; Shaw, Jane M.; Chang, Tuwon

doi:10.1116/1.588297

Cited by 392 publications

(242 citation statements)

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“…These devices have shown potential for characterizing and sorting cells and micro-organisms [9][10][11][12] as well as for solid-state electrohydrodynamic pumping of liquid [13]. The fabrication of large-area twDEP devices has been presented previously [9] and many of the relevant fabrication technologies are available in the literature [14][15][16][17][18]. The twDEP devices incorporate microelectrode arrays fabricated using multilayer fabrication techniques with sealed planar microfluidic channels, including sample inlets and outlets.…”

Section: Introductionmentioning

confidence: 99%

Optical particle detection integrated in a dielectrophoretic lab-on-a-chip

Zhang

Morgan

2001

J. Micromech. Microeng.

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The design and fabrication of a dielectrophoretic 'lab-on-a-chip' device for bioparticle processing and counting is presented. The device consists of a multi-layer travelling wave dielectrophoretic electrode array for manipulating particles and/or fluids, microchannels for delivering samples and optical fibres for counting particles and/or measuring their velocities. Single particles were detected optically using either light scattering or fluorescence emission. The technology described in this study is potentially applicable to a range of particulate diagnostic systems.

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Section: Introductionmentioning

confidence: 99%

Optical particle detection integrated in a dielectrophoretic lab-on-a-chip

Zhang

Morgan

2001

J. Micromech. Microeng.

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“…The mechanical shadow-mask consist of a membrane and a rim made of the photoplastic material EPON-SU-8 [8]. First a 5-µm-thin membrane with the apertures patterns is made, and second, a 150-µm-thick mechanical rim, which sustains the membrane.…”

Section: Photo-plastic Shadow Maskmentioning

confidence: 99%

Transducers ’01 Eurosensors XV

Obermeier¹

2001

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SUMMARYA rapid and simple fabrication method to construct tiny shadow-masks and their use in multi-layer surface patterning with in-situ micromechanical alignment is presented. Free-standing shadow-mask membranes are made of a 5-µm-thick SU-8 based resist layer by photolithography. They are supported by a 1-mm-large and 150-µm-thick SU-8 rim. The membrane has apertures with feature sizes ranging from 6-300 µm. Multiple layer deposition by electron beam evaporation of Cr, Au and Al through the membrane apertures results in aligned multilayer patterns. By using in-situ micromechanical alignment pins or jigs we achieved an overlay precision of < 2 µm in both, x and y direction. The resistless shadow mask deposition technique eliminates photolithography processes and allows surface patterns to be made in a rapid and vacuum-clean way on arbitrary millimeter-size surfaces, and at low-cost.

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“…The main advantages of this microvalve design are that: (i) No extra energy source is required to close the fluidic path, hence the loaded device is highly portable; and (ii) the device can be built by PDMS replicas from photolithographically patterned SU-8 molds, allowing for microfabricating deep (up to 1 mm) channels with vertical sidewalls (i.e., the height of the features can be specified independently of their width) [11] and resulting in very precise features. The prototype device features two arrays of photolithographically defined nanoliter fluidic chambers and two individually controlled sets of microvalves.…”

Section: Introductionmentioning

confidence: 99%

Parallel mixing of photolithographically defined nanoliter volumes using elastomeric microvalve arrays

Hsu

Folch

2005

Electrophoresis

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Portable microfluidic systems provide simple and effective solutions for low-cost point-of-care diagnostics and high-throughput biomedical assays. Robust flow control and precise fluidic volumes are two critical requirements for these applications. We have developed a monolithic polydimethylsiloxane (PDMS) microdevice that allows for storing and mixing subnanoliter volumes of aqueous solutions at various mixing ratios. Filling and mixing is controlled via two integrated PDMS microvalve arrays. The volumes of the microchambers are entirely defined by photolithography, hence volumes from picoliter to nanoliter can be fabricated with high precision. Because the microvalves do not require an energy input to stay closed, fluid can be stored in a highly portable fashion for several days. We have confirmed the mixing precision and predictability using fluorescence microscopy. We also demonstrate the application of the device for calibrating fluorescent calcium indicators. Due to the biocompatibility of PDMS, the device will have broad applications in miniaturized diagnostic assays as well as basic biological studies.

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Micromachining applications of a high resolution ultrathick photoresist

Cited by 392 publications

References 0 publications

Optical particle detection integrated in a dielectrophoretic lab-on-a-chip

Optical particle detection integrated in a dielectrophoretic lab-on-a-chip

Transducers ’01 Eurosensors XV

Parallel mixing of photolithographically defined nanoliter volumes using elastomeric microvalve arrays

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