1997
DOI: 10.1109/5.649660
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Micromachining for optical and optoelectronic systems

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Cited by 246 publications
(103 citation statements)
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“…Progress in micro-electromechanical systems (MEMS) technology helped the miniaturization and realization of complex optical components such as lenses, mirrors, filters, beam splitters, and gratings on chip, and these elements are commonly labelled to as microopto-electromechanical systems (MOEMS) [1]. The emergence of SOI wafer batch processing technology has accelerated the development of high performance and reliable passive components including low-loss waveguides, power splitters and multiplexers [2,3].…”
Section: Introductionmentioning
confidence: 99%
“…Progress in micro-electromechanical systems (MEMS) technology helped the miniaturization and realization of complex optical components such as lenses, mirrors, filters, beam splitters, and gratings on chip, and these elements are commonly labelled to as microopto-electromechanical systems (MOEMS) [1]. The emergence of SOI wafer batch processing technology has accelerated the development of high performance and reliable passive components including low-loss waveguides, power splitters and multiplexers [2,3].…”
Section: Introductionmentioning
confidence: 99%
“…However, the situation is rapidly changing with the upcoming new generation of wavefront compensation hardware: high-resolution liquid crystal (LC) spatial phase modulators and micro-electromechanical systems (MEMS) containing large arrays of LC cells or micro-mirrors. [1][2][3][4] These new devices can potentially provide wavefront shaping with spatial resolution on the order of 10 4 -10 6 elements. Such resolution is difficult to match with the traditional wavefront sensors used in adaptive optics: lateral shearing interferometer, 5,6 Shack-Hartmann, 7 curvature sensors, 8,9 etc.…”
Section: Introductionmentioning
confidence: 99%
“…In the field of optomechatronic systems, scanning mirrors or scanners have gathered a significant attention, since they are a fundamental element of a wide variety of devices, such as barcode readers, confocal microscopes and laser printers (Wu 1997, Urbach 1982, Miyajima 2003. Scanners project laser beams that are used, for example, to produce images by raster scanning or collect images in confocal microscopy.…”
Section: Introductionmentioning
confidence: 99%