Micromachining of glass inertial sensors

Abstract

We demonstrate the feasibility of a powder blasting micro-erosion process for the micromachining of accelerometer devices in glass. Using high-speed abrasive microparticles and a metal contact mask, we structure millimeter-size cantilever beams from simple glass slides. By metalizing one side of the glass substrate, we demonstrate both capacitive and piezoresistive/strain gauge detection of the vibrating cantilever mass and measure the frequency response of mechanically excited cantilever beams. We think that our approach opens new perspectives for manufacture of inertial sensing devices in a technology alternative to Si.[664]

A level set methodology for predicting the surface evolution of inclined masked micro-channels resulting from abrasive jet micro-machining at oblique incidence

“…For example, AJM has been used to micro-machine glass to produce three-dimensional (3D) suspended micro-cantilever beams for inertial sensors [3], microfluidic channels [4] and high aspect ratio (AR), i.e. feature depth-to-width ratio, features [5].…”

Abrasive jet micro-machining of planar areas and transitional slopes in glass using target oscillation

“…AJM has been used to fabricate several devices. For instance, Belloy et al (2002) fabricated glass inertial sensors using AJM; Schelautmann et al (2001) used powder blasting technology as an alternate tool for the microfabrication of electrophoresis capillaries; Park et al (2005) machined micro-molds in steel; and Yamahata et al (2005) fabricated a ball valve micropump in glass using AJM.…”

A method of etching and powder blasting for microholes on brittle materials

“…In the process of powder blasting, mask was closely stuck on or magnetically attracted to the substrate to protect the area of substrate not to be powder blasted (Belloy et al, 2002). Conventionally, a rubber or metal sheet was the main material of mask and was cut by a cutter to form the mask pattern.…”