Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze?

Manz, A.; Fettinger, James C.; Verpoorte, Elisabeth; Lüdi, Hans; Widmer, Hans; Harrison, David

doi:10.1016/0165-9936(91)85116-9

Cited by 253 publications

(195 citation statements)

References 15 publications

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“…Accordingly, early microfluidic devices were manufactured in silicon. 1,9 An obvious follow-on from silicon was the use of glass. This resulted in devices being produced in common silica glass, Pyrex and quartz, into which channel networks were etched using similar methodologies as those used for silicon.…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4][5] One of the main drivers behind such work lies in the fact that when micrometer-scale fluidic channels are used, they have a high surface-tovolume ratio compared with more conventional (Ͼ1 cm) vessels. As an analogy, when the dimension of a cube is reduced from 1 mm to 1 µm, the surface-to-volume ratio increases by a factor of a thousand.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Materials Matter in Microfluidic Devices

Zhang¹,

Haswell²

2006

MRS Bull.

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A number of materials, including silicon, quartz, glass, metal, and polymers, have been used to date to fabricate mi- MRS BULLETIN • VOLUME 31 • FEBRUARY 2006 95 Materials Matter in Microfluidic DevicesXunli Zhang and Stephen J. Haswell AbstractAs more micro-and nanofluidic methodologies are developed for a growing number of diverse applications, it becomes increasingly apparent that the choice of substrate material can have a profound effect on the eventual performance of a device. This is due mostly to the high surface-to-volume ratio that exists within such small structures. In addition to the obvious limitations related to the choice of solvent, operating temperatures, and pressure, the method of fluidic pumping-in particular, an electrokinetics-based methodology using a combination of electro-osmotic and electrophoresis flows-can further complicate material choice. These factors, however, are only part of the problem; once chemicals or biological materials (e.g., proteins or cells) are introduced into a microfluidic system, surface characteristics will have a profound influence on the activity of such components, which will subsequently influence their performance. This article reviews the common types of materials that are currently used to fabricate microfluidic devices and considers how these materials may influence the overall performance associated with chemical and biological processing. Consideration will also be given to the selection of materials and surface modifications that can aid in exploiting the high surface properties to enhance process performance.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Materials Matter in Microfluidic Devices

Zhang¹,

Haswell²

2006

MRS Bull.

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“…Since the introduction of the concept of micro total analysis systems or lTAS in 1990 (Manz et al 1990;Manz et al 1991), multiple fluidic microchip technologies have been developed. A continuous challenge has been the transport and pumping of small quantities of biological fluids, of the order of a few microliters per minute.…”

Section: Introductionmentioning

confidence: 99%

A PMMA valveless micropump using electromagnetic actuation

Yamahata

Lotto

Al-Assaf

et al. 2004

Microfluid Nanofluid

160

102

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We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection ($200 lm) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 ll/min and backpressures of up to 12 mbar. We study the frequency-dependent flow rate and determine a resonance frequency of 12 and 200 Hz for pumping of water and air, respectively. Our experiments show that the models for valveless micropumps of A. Olsson et al. (J Micromech Microeng 9:34, 1999) and L.S. Pan et al. (J Micromech Microeng 13:390, 2003) correctly predict the resonance frequency, although additional modeling of losses is necessary.

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“…In early 1990s, Manz et al demonstrated the potential of microfluidics to address the issues of conventional analytical methods with their chip-based LC and CE systems with integrated monitoring components. 12,[17][18][19] This marked the dawn of the modern microfluidics technology.…”

mentioning

confidence: 99%

Microfluidics technology: future prospects for molecular diagnostics

Lo¹

2017

AHCT

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Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze?

Cited by 253 publications

References 15 publications

Materials Matter in Microfluidic Devices

Materials Matter in Microfluidic Devices

A PMMA valveless micropump using electromagnetic actuation

Microfluidics technology: future prospects for molecular diagnostics

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