Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37 2000
DOI: 10.1109/cleo.2000.907416
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Micromachining results using industrial fluorine lasers at 157 nm

Michael Scaggs
1
,
Eric Mayer
2
,
John H. Fair
3
et al.
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