Micromanipulation of spherical particles during condensation and evaporation of water in an environmental scanning electron microscope

Schröter, Felix; Schmidt, Eberhard

doi:10.1016/j.powtec.2018.02.010

Cited by 6 publications

(2 citation statements)

References 20 publications

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“…The micro-gripper is a device that has been widely used in the field of micromanipulation and micro-assembly, such as MEMS [1][2][3], bio-engineering [4][5][6], advanced optics [7][8][9], precision instruments [10], and other fields. As an end-effector that performs micro-assembly and micro-manipulation tasks, it directly interacts with the manipulated object.…”

Section: Introductionmentioning

confidence: 99%

Motion Characteristics of Self-Sensing Piezoelectric Actuator for Yarn Micro-Gripper

Peng,

Sun,

et al. 2024

Applied Sciences

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In order to solve the problem of low response frequency and poor consistency of conventional yarn grippers in weft accumulators, in this study, a piezoelectric yarn gripper is used instead of conventional yarn grippers and the motion characteristics of its actuator are studied. This gripper uses a bimorph piezoelectric bending actuator with a low-cost, well integrated self-sensing method based on charge measurement. The modeling of the piezoelectric micromanipulator is based on the piezoelectric and Euler–Bernoulli beam equations. The static and dynamic characteristics of the piezoelectric actuator as well as the self-sensing capability were experimentally tested. The experimental results show that the maximum output displacement at the end of the piezoelectric actuator is 834 μm, and the maximum output force is 388 μN at 150 V driving voltage. The stability and consistency of its response are also very good, with a response speed of 24 ms. The self-sensing test of the output force also proved the feasibility of the self-sensing method used, with an error of 0.74%. The piezoelectric yarn gripper studied in this paper is promising for practical clamping applications.

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Section: Introductionmentioning

confidence: 99%

Motion Characteristics of Self-Sensing Piezoelectric Actuator for Yarn Micro-Gripper

Peng,

Sun,

et al. 2024

Applied Sciences

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“…Therefore, it has a broad application prospect in the fields of micro-assembly (Heriban et al, 2008), intelligent structure (Gao et al, 2020;Tanaka, 2014), precision machining (Lin et al, 2016), nanotechnology (Gu et al, 2016;Li et al, 2019), bioengineering (Zainal et al, 2015). For example, it is used in the assembly of micro-parts (Schro¨ter and Schmidt, 2018), the probe positioning of scanning probe microscope (Lu et al, 2018), the clamping of cells in bioengineering (Garce´s-Schro¨der et al, 2015;Kim et al, 2008). However, as a ferroelectric material, the piezoelectric actuator has nonlinear characteristics such as hysteresis and creep (Li et al, 2015;Sabarianand et al, 2020), and it is easy to oscillate under the action of step and pulse signals, which will affect the operation accuracy of micro-assembly and micro-operating system driven by a piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Precision open-loop control of piezoelectric actuator

Nie

Cui

Huang

et al. 2021

Journal of Intelligent Material Systems and Structures

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Due to space constraints, some micro-assemblies and micro-operating systems cannot install sensors, so it is challenging to achieve closed-loop control. For this reason, a precision open-loop control strategy for piezoelectric actuators is proposed. Firstly, based on the PI model and the proposed threshold partition method, the hysteresis model of the piezoelectric actuator with rate-dependent and few operators is established. Then the hysteresis error of the piezoelectric actuator is compensated by the inverse model obtained. Secondly, the creep model of the logarithmic piezoelectric actuator with simple expression and few parameters is established. Then, a creep controller without demand inverse is designed to compensate for the creep error of the piezoelectric actuator. Finally, a ZVD (Zero Vibration Derivative) input shaping method with good robustness is given to eliminate the oscillation generated by the piezoelectric actuator under the action of the step signal. The experimental results show that the displacement error of piezoelectric actuator is reduced from −9.07 to 9.46 μm to −1.22 to 1.78 μm when the maximum displacement is 120 μm after hysteresis compensation; after creeping compensation, within the action time of the 1200 s, the displacement creep of the piezoelectric actuator was reduced from 5.5 μm before compensation to 0.3 μm; after the oscillation control, the displacement overshoot of the piezoelectric actuator is reduced to 0.6% of that before control.

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Design, manufacture, and clamping operation of a 4-DOF piezoelectric micro-gripper

et al. 2023

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Micromanipulation of spherical particles during condensation and evaporation of water in an environmental scanning electron microscope

Cited by 6 publications

References 20 publications

Motion Characteristics of Self-Sensing Piezoelectric Actuator for Yarn Micro-Gripper

Motion Characteristics of Self-Sensing Piezoelectric Actuator for Yarn Micro-Gripper

Precision open-loop control of piezoelectric actuator

Design, manufacture, and clamping operation of a 4-DOF piezoelectric micro-gripper

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