Different to the traditionally defined valved piezoelectric (PZT) pump and valveless PZT pump, two groups of PZT pumps with built-in compliant structures—with distances between the free ends of 0.2 mm (Group A) and 0 mm (Group B)—were designed, fabricated, and experimentally tested. This type of pump mainly contains a chamber 12 mm in diameter and 1.1 mm in height, a PZT vibrator, and two pairs of compliant structures arranged on the flowing channel. The flow-resistance differences between these two groups of PZT pumps were theoretically and experimentally verified. The relationships between the amplitude, applied voltage and frequency of the PZT vibrators were obtained experimentally, with results illustrating that the amplitude linearly and positively correlates with the voltage, while nonlinearly and negatively correlating to the frequency. The flow rate performance of these two groups was experimentally tested from 110–160 Vpp and 10–130 Hz. Results showed that the flow rate positively correlates to the voltage, and the optimum flow rate frequency centers around 90 Hz for Group A and 80 Hz for Group B, respectively. The flow rate performances of Group B were further measured from 60–100 Hz and 170–210 Vpp, and obtained optimal flow rates of 3.6 mL/min at 210 Vpp and 80 Hz when ignoring the siphon-caused backward flow rate. As the compliant structures are not prominently limited by the channel’s size, and the pump can be minimized by Micro-electromechanical Systems (MEMS) processing methods, it is a suitable candidate for microfluidic applications like closed-loop cooling systems and drug delivery systems.

Because little is known about the atomization theory of a micro-tapered aperture atomizer, we investigated the vibration characteristics of this type of atomizer. The atomization mechanism of a micro-tapered aperture atomizer was described, and the atomization rate equation was deduced. As observed via microscopy, the angle of the micro-tapered aperture changes with the applied voltage, which proved the existence of a dynamic cone angle. The forward and reverse atomization rates were measured at various voltages, and the influence of the micro-tapered aperture and its variation on the atomization rate was characterized. The resonance frequency of the piezoelectric vibrator was obtained using a laser vibrometer, and the atomization rates were measured at each resonance frequency. From experiments, we found that the atomization rates at the first five resonance frequencies increased as the working frequency increased. At the fifth resonance frequency (121.1 kHz), the atomization rate was maximized (0.561 mL/min), and at the sixth resonance frequency (148.3 kHz), the atomization rate decreased significantly (0.198 mL/min). The experimental results show that the vibration characteristics of the piezoelectric vibrator have a relatively strong impact on the atomization rate. This research is expected to contribute to the manufacture of micro-tapered aperture atomizers.

This paper reviews the development of valveless piezoelectric pump with cone-shaped tube chronologically, which have widely potential application in biomedicine and micro-electro-mechanical systems because of its novel principles and deduces the research direction in the future. Firstly, the history of valveless piezoelectric pumps with cone-shaped tubes is reviewed and these pumps are classified into the following types: single pump with solid structure or plane structure, and combined pump with parallel structure or series structure. Furthermore, the function of each type of cone-shaped tubes and pump structures are analyzed, and new directions of potential expansion of valveless piezoelectric pumps with cone-shaped tubes are summarized and deduced. The historical argument, which is provided by the literatures, that for a valveless piezoelectric pump with cone-shaped tubes, cone angle determines the flow resistance and the flow resistance determines the flow direction. The argument is discussed in the reviewed pumps one by one, and proved to be convincing. Finally, it is deduced that bionics is pivotal in the development of valveless piezoelectric pump with cone-shaped tubes from the perspective of evolution of biological structure. This paper summarizes the current valveless piezoelectric pumps with cone-shaped tubes and points out the future development, which may provide guidance for the research of piezoelectric actuators.

Due to the special transportation and heat transfer characteristics, the fractal-like Y-shape branching tube is used in valveless piezoelectric pumps as a no-moving-part valve. However, there have been little analyses on the flow resistance of the valveless piezoelectric pump, which is critical to the performance of the valveless piezoelectric pump with fractal-like Y-shape branching tubes. Flow field of the piezoelectric pump is analyzed by the finite element method, and the pattern of the velocity streamlines is revealed, which can well explain the difference of total flow resistances of the piezoelectric pump. Besides, simplified numerical method is employed to calculate the export flow rate of piezoelectric pump, and the flow field of the piezoelectric pump is presented. The FEM computation shows that the maximum flow rate is 16.4 mL/min. Compared with experimental result, the difference between them is just 55.5%, which verifies the FEM method. The reasons of the difference between dividing and merging flow resistance of the valveless piezoelectric pump with fractal-like Y-shape branching tubes are also investigated in this method. The proposed research provides the instruction to design of novel piezoelectric pump and a rapid method to analyse the pump flow rate.

Various kinds of the models had been proposed to explain the relationship between the performance and the structural parameters of valveless piezoelectric pumps, so as to evaluate the functional performance such devices. Among the models, the equivalent circuit model, which converts the multi-field problem of a valveless piezoelectric pump system into a simple circuit problem, is the most simple and clear one. Therefore, the proposed structure and working principle of the valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes are analyzed; then, the equivalent circuit model of the valveless piezoelectric pump is established based on the working principles of this pump and liquid-electric analogy theory. Finally, an experimental study of the pump is carried out, with a comparative analysis of the experimental results and the simulation results of the generated equivalent circuit. The experimental results show that with a driving voltage of 100 V and frequency of 6 Hz, the maximum flow rate of the valveless piezoelectric pump is 1.16 mL/min. Meanwhile, the output current of equivalent circuit also reaches its peak at the frequency of 6 Hz, therefore, indicating a good predictive ability of this model in calculating the maximum output flow rate and best working frequency of valveless piezoelectric pumps.