Micromechanical electrostatic field sensor for the characterization of charges in MEMS devices

Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3 Thin Films

“…Recently, microelectromechanical systems (MEMS)based electrostatic field sensors have been developed. [1][2][3][4][5][6] The developed MEMS-based sensors are electrostatically or thermally actuated ones. However, electrostatically actuated MEMS-based electrostatic field sensors have a problem in that the noise derived from a relatively high actuation voltage interferes with the precise measurement of electrostatic field.…”