Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical detection

Augustyniak, I.; Knapkiewicz, Paweł; Sareło, K.; Dziuban, Jan; Debourg, Émilie; Pons, Patrick; Olszacki, M.

doi:10.1016/j.sna.2015.05.006

Cited by 9 publications

(13 citation statements)

References 7 publications

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“…For GH2 = 4 × 10 −7 mol/J, the pressure Pg generated by the PE is given by Equation (1) [2], where VPE and Vg denote respectively the PE volume and the volume of gas expansion:…”

Section: Methodsmentioning

confidence: 99%

“…In our previous design (see Figure 1), a double Si/Glass stack was used for the sensor fabrication and leads to a complex technological process and non-sealed cavity for the resonator. The PE was obtained from peeling small ball and the Si/Glass2 bonding was performed under N2 using a noncollective process Moreover, the sensor sensitivity varied significantly from one sensor to another and was about 20 times higher than the simulation results [2]. The possible reason could be the pollution of PE during sensor fabrication leading to the undesirable out-gassing after irradiation.…”

Section: Introductionmentioning

confidence: 91%

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Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor

et al. 2018

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In this paper, the out-gassing from PolyEthylene (PE) film is studied under nuclear irradiation for the design and fabrication of passive MEMS dosimeters. The fabrication of sensor needs high temperature process that leads to specific constraints on the PE film. Radiation chemical yield of hydrogen production (GH2) from PE under gamma irradiation is verified by mass spectroscopy after temperature annealing in vacuum up to 400 °C. Prototypes are fabricated to validate the fabrication of the sensor and then irradiated with high energy gamma radiation (with dose of 20 kGy). Measurements of membrane deflections after irradiation validate the GH2 factor, showing low pollution level of PE during sensor fabrication.

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“…For GH2 = 4 × 10 −7 mol/J, the pressure Pg generated by the PE is given by Equation (1) [2], where VPE and Vg denote respectively the PE volume and the volume of gas expansion:…”

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 91%

Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor

et al. 2018

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“…From the measurement of the frequency shift the level of nuclear irradiation can be derived. The sensing devices have been manufactured according to the process flow reported in [2] and are shown in Figure 2. The measured reflection coefficient at the input of the sensing device before nuclear irradiation is reported in Figure 3.…”

Section: A Sensor Performances Before Nuclear Irradiationmentioning

confidence: 99%

“…One solution to overcome these constraints consists of remotely interrogating nuclear radiation sensors from radar reader. Wireless, chipless and passive dosimeters have been presented in [1]- [2]. These sensors are based on the electromagnetic transduction principle.…”

Section: Introductionmentioning

confidence: 99%

Wireless and passive nuclear radiation sensors

Arenas

Philippe

Henry

et al. 2017

2017 47th European Microwave Conference (EuMC)

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This communication reports the first experimental results obtained from new type of passive Hydrogen-Pressure Dosimeters for the remote measurement of nuclear radiation. Technological and experimental analyses are performed here to demonstrate the proof-of-concept. Radar measurements of irradiated and non-irradiated passive dosimeters are also reported and confirm the feasibility of the remote reading of such passive sensors. A new design is proposed for minimizing the impact of technological inaccuracies on sensors performances and for facilitating the packaging.

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“…The technology developed and described here opens the way to fabricate MEMS sensors of high level of radiation. The development of high radiation MEMS sensor, including sensor technology and radiation tests, is presented in [21]. …”

mentioning

confidence: 99%

Sealing of silicon-glass microcavities with polymer filling

Knapkiewicz¹,

Augustyniak²

2016

Bulletin of the Polish Academy of Sciences Technical Sciences

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Abstract. Investigation of hermetic sealing of selected polymers in silicon-glass microcavities has been presented. The anodic bonding method has been adapted for hermetic encapsulation of the polymer in microcavity. According to standard conditions of the anodic bonding process (temperature: 400°C, voltage: 1000 V), the main challenge was the significant reduction of temperature in order to avoid degradation of the polymer. An analysis of the influence of reduced temperature and oxygen-free atmosphere on bond quality has been done. Proper parameters of the anodic bonding process enabling good and hermetic encapsulation of the polymer in the microcavity as well as optimal polymer treatment have been elaborated. Studies have shown that the closure of high density polyethylene in microcavity by anodic bonding process at a temperature reduced to 340°C is possible. This procedure will be used for the fabrication of main elements for a new family of high radiation MEMS sensors.Key words: anodic bonding, polymer filling, sealing of silicon and glass.Sealing of silicon-glass microcavities with polymer filling P. KNAPKIEWICZ* and I. AUGUSTYNIAK Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Janiszewskiego St., 50-372 Wrocław, Poland in presence of polymer, reduced temperature and oxygen-free atmosphere is necessary and is the main subject of this article. The technology developed and described here opens the way to fabricate MEMS sensors of high level of radiation. The development of high radiation MEMS sensor, including sensor technology and radiation tests, is presented in [21]. Technical analysis2.1. Anodic bonding process. The direct silicon-to-glass anodic bonding is a direct sealing process in which a stable chemical bond between bonded materials is obtained. The anodic bonding process is a complicated chemical reaction, which has been shown in three main steps (Fig. 1) [22]:• generation of electrostatic force by applied voltage -initiation of joining substrates, • formation of depleted layer in glass by sodium ion current, • formation of Si-O chemical bond.

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Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical detection

Cited by 9 publications

References 7 publications

Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor

Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor

Wireless and passive nuclear radiation sensors

Sealing of silicon-glass microcavities with polymer filling

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