Micromechanical relay with electrostatic actuation and metallic contacts

Grétillat, M.-A.; Grétillat, F.; Rooij, N. F. de

doi:10.1088/0960-1317/9/4/307

Cited by 47 publications

(31 citation statements)

References 14 publications

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“…Electrostatic actuation is widely used in MEMS devices. Except for micropumps and microvalves in microfluidic applications, other examples also can be found in electrostatic micro motors (Trimmer and Gabriel 1987), electrostatic micro mirrors (Pacheco et al 2000;Pu et al 2004), and electrostatic micro switches and relays (Gretillat 1999).…”

Section: Electrical Actuationmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

296

169

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This paper briefly reviews recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields. A comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations for micro pumping is provided with illustrative diagrams. Then, a comparative study of current mechanical micropump designs highlighting their advantages and limitations for various applications is presented, based on performance criteria such as actuation voltage and power consumption, ranges of operating frequency and maximum flow rate and backpressure. This study compiles and provides some basic guidelines for selection of the actuation schemes and flow rate requirements in biomedical applications. Different micropumps in biomedical applications, such as blood transport and drug delivery also have been reviewed.

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Section: Electrical Actuationmentioning

confidence: 99%

Current micropump technologies and their biomedical applications

Amirouche

Zhou

Johnson³

2009

Microsyst Technol

296

169

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“…The exploitation of polysilicon surface micromachining have been mostly performed for mechanical and electrostatic micro actuators and sensors [16,20]. The surface micromachining of polysilicon as heating element has been reported lately [17][18][19].…”

Section: E-mail Address: Danickbriand@uninech (D Briand)mentioning

confidence: 99%

Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Briand

Pham

Rooij

2007

Sensors and Actuators A: Physical

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This paper presents the design, fabrication and characterisation of surface micromachined polysilicon microheaters to be used as microigniters for micropropulsion applications. The microigniters are heated up by Joule effect and the thermal losses through the substrate are minimised by suspending the microheaters above the substrate. The developed process was compatible with the integration of the nozzle part of the microthruster. The electrical, thermal and mechanical characteristics of the microheaters were studied with the aim of evaluating their reliability. Temperatures up to 470 • C could be reached with an electrical power of 45 mW/beam. The current-voltage relation followed a linear characteristic at low power; at high bias voltages, a drift of the electrical resistance was measured after a few I-V cycles at power higher than 40 mW/beam. The elastic and plastic deformation threshold of the microheaters in operation and their maximum deflection before rupture were measured. The microheaters could dissipate relatively high constant powers for a few minutes to hours. The fabricated microheaters are promising candidates for the ignition of solid propellant microthrusters.

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“…3.2 2D distributed model [15][16][17][18][19] Compared with the 1D lumped model, the 2D distributed model can contain the influences of the fringing field, residual stress, axial stress, and so on. Thus it can attain more accurate solutions.…”

Section: Existing Modelsmentioning

confidence: 99%

“…By comparing Eqs. (17), (19), (20) and (21), we know that the influences of axial stress, residual stress and fringing-field effect are represented by P 2 , P 3 and F r , respectively.…”

Section: Some Models Of Rf Mems Switchesmentioning

confidence: 99%

Electromechanical model of RF MEMS switches

Zhang

Zhao

2003

Microsystem Technologies

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With the recent rapid growth of Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) switches, there has developed an emergent requirement for more accurate theoretical models to predict their electromechanical behaviors. Many parameters exist in the analysis of the behavior of the switch, and it is inconvenient for further study. In this paper, an improved model is introduced, considering simultaneously axial stress, residual stress, and fringing-field effect of the fixed-fixed bridge structure. To avoid any unnecessary repetitive model tests and numerical simulation for RF MEMS switches, some dimensionless numbers are derived by making governing equation dimensionless. The electromechanical behavior of the fixed-fixed bridge structure of RF MEMS switches is totally determined by these dimensionless numbers.

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Micromechanical relay with electrostatic actuation and metallic contacts

Cited by 47 publications

References 14 publications

Current micropump technologies and their biomedical applications

Current micropump technologies and their biomedical applications

Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Electromechanical model of RF MEMS switches

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