Micromechanical Resonator Array for an Implantable Bionic Ear

Bachman, Mark; Zeng, Fan‐Gang; Xu, Tao; Li, G.P.

doi:10.1159/000090682

Cited by 30 publications

(31 citation statements)

References 46 publications

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“…However, these devices have no potential for generating electrical output in response to sound stimuli. Providing high-quality hearing through the cochlear implant involves the development of a device with high channel capability, low-power requirements, and small size (29). The work by Bachman et al (29) fabricated a micromechanical multiband transducer that consisted of an array of micromachined polymer resonators, and it examined its sensitivity to sound frequency; however, the work focused on the low-power requirements of the transducer and proposed a design that could be implanted into the middle ear cavity (29), which fundamentally differed from our concept.…”

Section: Generation Of Voltage Output By the Implanted Device In Respmentioning

confidence: 99%

“…The device, which consists of a piezoelectric membrane and silicon frame, can be implanted into the guinea pig cochlea. It is able to resonate in response to sound stimuli similar to the natural basilar membrane and generate electric output, whereas previously reported devices required an electrical supply, and realizing low-energy requirements remains a goal for the future development of cochlear implants (29). We, therefore, consider the ability of our device to generate electrical output in response to sound stimuli to be a great advantage.…”

Section: Generation Of Voltage Output By the Implanted Device In Respmentioning

confidence: 99%

See 1 more Smart Citation

Piezoelectric materials mimic the function of the cochlear sensory epithelium

Inaoka

Shintaku²,

Nakagawa³

et al. 2011

Proc. Natl. Acad. Sci. U.S.A.

123

127

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Cochlear hair cells convert sound vibration into electrical potential, and loss of these cells diminishes auditory function. In response to mechanical stimuli, piezoelectric materials generate electricity, suggesting that they could be used in place of hair cells to create an artificial cochlear epithelium. Here, we report that a piezoelectric membrane generated electrical potentials in response to sound stimuli that were able to induce auditory brainstem responses in deafened guinea pigs, indicating its capacity to mimic basilar membrane function. In addition, sound stimuli were transmitted through the external auditory canal to a piezoelectric membrane implanted in the cochlea, inducing it to vibrate. The application of sound to the middle ear ossicle induced voltage output from the implanted piezoelectric membrane. These findings establish the fundamental principles for the development of hearing devices using piezoelectric materials, although there are many problems to be overcome before practical application.cochlear implant | hearing loss | mechanoelectrical transduction | traveling wave | regeneration T he cochlea is responsible for auditory signal transduction in the auditory system. It responds to sound-induced vibrations and converts these mechanical signals into electrical impulses, which stimulate the auditory primary neurons. The human cochlea operates over a three-decade frequency band from 20 Hz to 20 kHz, covers a 120-dB dynamic range, and can distinguish tones that differ by <0.5% in frequency (1). It is relatively small, occupying a volume of <1 cm 3 , and it requires ∼14 μW power to function (2). The mammalian ear is composed of three parts: the outer, middle, and inner ears (Fig. 1A) (3). The outer ear collects sound and funnels it through the external auditory canal to the tympanic membrane. The cochlea consists of three compartments: scala vestibuli and scala tympani, which are filled with perilymph fluid, and scala media, which is filled with endolymph fluid (Fig. 1C). The scala vestibuli and scala tympani form a continuous duct that opens onto the middle ear through the oval and round windows. The stapes, an ossicle in the middle ear, is directly coupled to the oval window. Sound vibration is transmitted from the ossicles to the cochlear fluids through the oval window as a pressure wave that travels from the base to the apex of the scala vestibuli through the scala tympani and finally to the round window (Fig. 1B). The scala media are membranous ducts that are separated from the scala vestibuli by Reissner's membrane and separated from the scala tympani by the basilar membrane. The pressure wave propagated by the vibration of the stapes footplate causes oscillatory motion of the basilar membrane, where the organ of Corti is located. The organ of Corti contains the sensory cells of the auditory system; they are known as hair cells, because tufts of stereocilia protrude from their apical surfaces (Fig. 1D). The oscillatory motion of the basilar membrane results in the shear motion of the st...

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Section: Generation Of Voltage Output By the Implanted Device In Respmentioning

confidence: 99%

Section: Generation Of Voltage Output By the Implanted Device In Respmentioning

confidence: 99%

Piezoelectric materials mimic the function of the cochlear sensory epithelium

Inaoka

Shintaku²,

Nakagawa³

et al. 2011

Proc. Natl. Acad. Sci. U.S.A.

123

127

View full text Add to dashboard Cite

show abstract

“…Notably, MEMS resonators have been considered for gas [5], vibration [6], ultrasound [7], chemical, and biological sensing [8]. MEMS resonators are also being considered for use in artificial cochlear implants [9]. In all these varied applications, MEMS resonators can provide flexible on-chip reconfigurability and performance, while potentially allowing for integration with electronic signal processors.…”

Section: Introductionmentioning

confidence: 99%

Low-Stress CMOS-Compatible Silicon Carbide Surface-Micromachining Technology—Part II: Beam Resonators for MEMS Above IC

Nabki

Cicek

Dusatko

et al. 2011

J. Microelectromech. Syst.

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Microelectromechanical beam resonators and arrays are fabricated using a custom low-temperature complementarymetal-oxide-semiconductor-compatible silicon carbide microfabrication process, detailed in Part I of this paper. Theoretical aspects are presented with modal analysis and numerical methods. Measurements of the resonant frequency, the quality factor, the transmission, and the tuning characteristics are presented for different device types and dimensions. Trends are analyzed, and performance metrics dependences are investigated. A tuning method based on integrated heaters is introduced and tested, yielding a very desirable constant insertion-loss tuning and a wide tuning range. Quality factors of up to 1493 and resonant frequencies of up to 26.2 MHz are demonstrated. Both the Young's modulus and the residual stress of the SiC film are extracted (261 GPa and < ±30 MPa, respectively), and favorably compare to values reported for polysilicon. [2010-0235] Index Terms-Micromechanical resonators, microelectromechanical systems (MEMS), resonator arrays, silicon carbide (SiC), surface micromachining, thermal tuning.

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“…Several researchers carried out various studies on the artificial basilar membrane mimicking structure and function of human cochlea. Tanaka et al [3] and Xu et al [4] developed acoustic sensors with the function of frequency selectivity by the use of resonance of cantilever arrays. Ito et al [5] developed a PVDF piezoelectric artificial cochlea which worked as a sensor with the acoustic/electric conversion and with the frequency selectivity based on MEMS technology.…”

Section: Introductionmentioning

confidence: 99%

Biomimetic acoustic sensor based on piezoelectric cantilever array

Hur

Kwak

Jung

et al. 2012

IEICE Electron. Express

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Abstract:In this research, a biomimetic acoustic sensor that can mimic the functional properties of basilar membrane in mammalian cochlea was fabricated with PMN-PT piezoelectric cantilever array. The piezoelectric cantilever array with ten different lengths was designed to obtain different resonant frequencies. It was fabricated by semiconductor processes and was poled to generate an electrical signal from an audible sound source. The fabricated acoustic sensor was tested by experimental setup. As an experimental result, the resonant frequencies of each cantilever and corresponding electrical signals were measured from 490 Hz to 13,600 Hz and the displacement sensitivity was measured with the audible frequency range.

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Micromechanical Resonator Array for an Implantable Bionic Ear

Cited by 30 publications

References 46 publications

Piezoelectric materials mimic the function of the cochlear sensory epithelium

Piezoelectric materials mimic the function of the cochlear sensory epithelium

Low-Stress CMOS-Compatible Silicon Carbide Surface-Micromachining Technology—Part II: Beam Resonators for MEMS Above IC

Biomimetic acoustic sensor based on piezoelectric cantilever array

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