Micromechanical tuning elements in a 620-GHz monolithic integrated circuit

Lubecke, Victor M.; McGrath, W. R.; Stimson, P.A.; Rutledge, D.B.

doi:10.1109/22.739288

Cited by 8 publications

(3 citation statements)

References 23 publications

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“…It allows for variations in the length of short circuit transmission line stubs, using scratch-drive actuators. This idea is an extension of the micromechanical SPB impedance tuner demonstrated by Lubecke et al [16].…”

Section: Impedance Tuners and Filtersmentioning

confidence: 99%

“…Lubecke et al [16] reported a noteworthy example of a micromechanical RF micromachined component, by demonstrating a functional tuning element in a fully monolithic sub-millimetre-wave integrated circuit. Here, two micromechanical SPB impedance tuners were integrated with coplanar waveguide transmission lines, in a quasi-optical detector circuit operating at 620 GHz.…”

Section: Rf Micromachined Componentsmentioning

confidence: 99%

See 1 more Smart Citation

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

125

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A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced integrated subsystems. An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS. An extensive literature survey has been undertaken and key papers have been cited; from these, the motivations behind different RF MEMS technologies are highlighted. The importance of understanding the limitations for realising new and innovative ideas in RF MEMS is discussed. Finally, conclusions are drawn as to where future RF MEMS technology may lead. It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production. The focus of RF MEMS circuits will shift from the digital phase shifter to high-Q tuneable filters.

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Section: Impedance Tuners and Filtersmentioning

confidence: 99%

Section: Rf Micromachined Componentsmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

125

View full text Add to dashboard Cite

show abstract

“…Measured results for independent position sweeps for each SPB tuner agreed very closely with theory and could be accurately repeated in tests conducted over a two-week period. The submillimeterwave function and performance of this circuit is described in more detail elsewhere [21], [22].…”

Section: Tuner Functionmentioning

confidence: 99%