Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations

Urai, Hikari; Makimura, Tetsuya; Ogawa, Masashi

doi:10.1007/978-3-319-73025-7_57

Cited by 4 publications

(1 citation statement)

References 11 publications

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“…Nanoprocessing of silicone/PDMS was realized using soft X radiation generated by laser plasma. 2 In addition, UV lasers, green subnanosecond lasers, femtosecond lasers, and other devices have been recently used as light sources that make possible high-quality precision micromachining. [3][4][5] The author took a slightly different approach, and reported on fabrication of micro-swelling structures on silicone rubber using vacuum UV lasers.…”

Section: Introductionmentioning

confidence: 99%

Periodic cylindrical structure of micro‐swelling silicone rubber fabricated by ArF excimer laser

Okoshi

2021

Elect Comm in Japan

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Cylindrical structure of micro-swelling silicone rubber of approximately 1 µm diameter and 1.5 to 2 µm height was fabricated by the 193-nm ArF excimer laserinduced photodissociation of Si-O bonds of silicone rubber. To be periodically, single layer of silica glass microspheres was aligned on aluminum-coated silicone rubber during laser irradiation. The silicone rubber underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. The aluminum also adjusted a focal point to the surface of silicone rubber to form a hole approximately 0.5 µm diameter centered at each the swelled silicone rubber. A purging O 2 molecules in the laser beam path by N 2 gas and lowering the laser pulse repetition rate were effective for fabricating the regular cylindrical structure. The regular cylindrical structure of micro-swelling silicone rubber showed superhydrophobicity.

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