Microoptical phased arrays for spatial and spectral, switching

Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

“…While optical MEMS based on scanning mirrors are widely commercialized [1,2], SLPM will play crucial roles in such applications as optical wavefront control, femto-second pulse shaping and tunable filters [3]. Compared to a conventional liquidcrystal phase shifter that controls the optical phase by staircase function, a MEMS-based SLPM shows good performance in terms of control flexibility because the micromirror array can form smooth phase profile by bidirectional rotation and translation motion as shown in Figure 1.…”

Spatial Light Phase Modulator With Bidirectional Tilt–Piston Micromirror Array—Part I: Principle and Design

“…A MEMS-based spatial light phase modulator (SLPM) (MEMS-SLPM), that controls the optical phase in free space, is the key device to serve this purpose and has been used for such applications as optical wavefront control, femtosecond pulse shaping [6]- [10], and tunable filters [11], [12]. Compared with a liquid-crystal-based SLPM (LC-SLPM) [8], MEMS-SLPM is free from polarization-dependent loss, which is inevitable in LC-SLPM.…”

“…Typical examples of the 1-D type are the grating light valve (GLV) [14], [15], the polychrometer [16]- [18], and the coherent micromirror array [11], [12], [19]. In the GLV, an array of small electrostatically actuated diffraction grating is used to control the intensity of the incident light.…”

Fabry-Perot Interferometer Filters

“…The Gires-Tournois filter is particularly suited for advanced spectral filter shaping, e. g. by inserting it in a Michelson interferometer setup, and by using e. g. micro-electromechanical systems (MEMS) -based micro-mirror arrays [4].…”