The process of annealing of a CdTe:Cl ingot during its cooling after growth was studied. The annealing was performed in two stages: a high-temperature stage, with an approximate equality of chlorine and cadmium vacancy concentrations established at the thermodynamic equilibrium between the crystal and vapors of volatile components, and a low-temperature stage, with charged defects interacting to form neutral associations. The chlorine concentrations necessary to obtain semi-insulating crystals were determined for various ingot cooling rates in the high temperature stage. The dependence of the chlorine concentration [Cl + Te ] in the ingot on the temperature of annealing in the high-temperature stage was found. The carrier lifetimes and drift mobilities were obtained in relation to the temperature and cadmium vapor pressure in the postgrowth annealing of the ingot.As is known, the low conductivity of CdTe crystals and the high free-carrier lifetimes and mobilities, needed for nuclear radiation detectors [1,2], can be achieved in a chlorine-doped material owing to the selfcompensation of charged atomic defects [3][4][5][6].Previously [7, 8], we have studied the self-compensation in annealing of 3 x 3 x 12 mm 3 CdTe:Cl samples under controlled pressure of Cd and Те vapors, simulating the cooling of an ingot after crystal growth at T≤ 980°C. The annealing produced semi-insulating samples with a conductivity of σ = 10 . Unfortunately, the annealing could not be performed in these studies at the highest temperatures, where post-growth annealing sets in, nor at low cadmium vapor pressure P Cd --P Cd min . This was due to the fact that under these conditions the sublimation and transfer of the material into the cold part of an ampule caused changes not only at the surface, but also in the bulk of the sample, indicated by its nonuniform electrical conductivity.In this paper, we report the results obtained by studying self-compensation in the annealing of an ingot immediately after its growth, with the annealing practically beginning with the compound crystallization temperature.CdTe:Cl ingots weighing 0.5-1.0 kg are grown by horizontal planar crystallization under controlled cadmium vapor pressure [9]. During the growth, the material is doped with N(С1) of chlorine. During the post-growth cooling, the ingot is annealed, which enables the self-compensation of charged atomic crystal defects beginning with the highest temperatures. The self-compensation occurs in two annealing stages. In the first stage, there occurs high temperature annealing (T ann = 1070-800°C when the solubility of intrinsic atomic defects is high Cd defect governs the self-compensation in CdTe [6,10].