Abstract. Mechanical failure of monodisperse Ni/Au coated acrylic particles has been investigated by individual compression tests using nanoindentation-based technique equipped with a flat diamond punch. We have found that both fracture property and morphology of particles depend on the compression loading rate. The breaking strain of the metal coating decreases with increasing loading rate, while the breaking stress increases. Two obvious fracture patterns with cracking in meridian or latitude direction are identified according to the loading rate, and attributed respectively to tension-or bendingdominated deformation of the coating. The findings reported here give a significant guiding to the manufacture design of metal coated polymer particles for Anisotropic Conductive Adhesive (ACA) packaging.