Microsensor based on low temperature cofired ceramics and gas-sensitive thin film

Pisarkiewicz, T.; Sutor, Alexander; Potempa, Przemyslaw; Maziarz, Wojciech; Thust, Heiko; Thelemann, Torsten

doi:10.1016/s0040-6090(03)00514-5

Cited by 37 publications

(16 citation statements)

References 5 publications

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“…Gas sensors based on semiconducting metal oxides such as SnO 2 [1,2], TiO 2 [3,4] and ZnO [5][6][7] have played an increasing role in this field due to the availability of metal oxides, coupled with their good responses and the possibility to modulate and tailor their electrical characteristics.…”

Section: Introductionmentioning

confidence: 99%

CO sensing properties of Ga-doped ZnO prepared by sol–gel route

Hjiri

Dhahri

Mır

et al. 2015

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

CO sensing properties of Ga-doped ZnO prepared by sol–gel route

Hjiri

Dhahri

Mır

et al. 2015

Journal of Alloys and Compounds

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“…They all are hydrophobic, have large surface area and grain diameters suitable to channel dimensions. According to data provided by company the best adsorbent material for breath analysis is Carboxen-1018 [24]. The selected physical characteristics of Carbon Adsorbents are presented in Table I.…”

Section: Resultsmentioning

confidence: 99%

A Micropreconcentrator Design Using Low Temperature Cofired Ceramics Technology for Acetone Detection Applications

et al. 2013

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We design and manufacture the gas micropreconcentrator in low temperature cofired ceramics (LTCC) technology. The structure is 1.2-mm thick and has lateral dimensions of 25 × 20 mm. It consists of eight layers of LTCC green tapes with spiral-shaped channel filled with absorbing powder. Two heaters covered by the ceramic foils are embedded over and below the channel. The heaters are required for heating the adsorbent to elevated temperatures during its activation and desorption processes. In this paper, we describe the fabrication processes of a micropreconcentrator structure designed for acetone detection applications together with thermal and preconcentration measurements of the device. Commercially available adsorbents: Carboxen-1018, Carboxen-1012, and Carboxen-1003 from Sigma-Aldrich are selected and tested in order to concentrate low levels of acetone. The best concentration factor obtained is 5250.

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“…The investigated sensors were fabricated in the Department of Electronics both using ceramic LTCC [2] and silicon micromachined substrates [3], Fig.la. The sensors were fixed to the encapsulation header by different methods.…”

Section: Methodsmentioning

confidence: 99%

<title>Influence of gas microsensor mounting technique on its temperature time constant</title>

Maziarz

Pisarkiewicz

2006

SPIE Proceedings

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Metal oxide semiconductor gas sensors with modulated working temperature should reveal small thermal time constant in comparison to the time constants of chemical reactions between gas atmosphere and sensitive layer. In such case analyzed sensor response is dominated with specific phenomena originated from these reactions. A way the sensors are mounted has big influence on the sensor thermal time constants. In experiments authors used gas sensors with ceramic and micromachined silicon substrates glued to the case or suspended on thin wires. Although mechanical stability and durability of glued sensors are better, the lower power consumption and lower time constants are possible with sensors mounted using thin wires.

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Microsensor based on low temperature cofired ceramics and gas-sensitive thin film

Cited by 37 publications

References 5 publications

CO sensing properties of Ga-doped ZnO prepared by sol–gel route

CO sensing properties of Ga-doped ZnO prepared by sol–gel route

A Micropreconcentrator Design Using Low Temperature Cofired Ceramics Technology for Acetone Detection Applications

<title>Influence of gas microsensor mounting technique on its temperature time constant</title>

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