Microshape Measurement Method Using Speckle Interferometry Based on Phase Analysis

Arai, Yasuhiko

doi:10.3390/photonics8040112

Cited by 7 publications

(8 citation statements)

References 27 publications

(72 reference statements)

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“…If the real part is considered as the cosine component and the imaginary part as the sine component, then based on the addition theorem of trigonometric functions, the difference between the phase distributions of cos (ф1 − ф2) and sin (ф1 − ф2) can be obtained as a specklegram, as shown in Figure 3(4) [11]. In this study, instead of using the ratio of When these speckle patterns are Fourier transformed, a carrier signal can be generated in the speckles because of the angle between the wavefronts of the reference light and the object light [14,18].…”

Section: Measurement Optics and Measurement Processmentioning

confidence: 99%

“…If the real part is considered as the cosine component and the imaginary part as the sine component, then based on the addition theorem of trigonometric functions, the difference between the phase distributions of cos (φ 1 − φ 2 ) and sin (φ 1 − φ 2 ) can be obtained as a specklegram, as shown in Figure 3(4) [11]. In this study, instead of using the ratio of cosine and sine to obtain the phase difference φ 1-2 by the arctangent function, the spatial fringe analysis method [23], which can remove the noise component through more detailed processing, was used.…”

Section: Removal Of Bias Component In Speckle Patternsmentioning

confidence: 99%

“…In this study, it is assumed that a two-dimensional structure is directional, such as fibrous and further branching structures in the image. That is, it is neither a periodic structure such as a diffraction grating, nor a shape measurement of microspheres randomly distributed in space, as discussed in a previous paper [11]. The initial letter "K" of Kansai University, to which the author belongs, was used as a test sample.…”

Section: Setting Up a 2d Integration Pathmentioning

confidence: 99%

“…This newly reported method based on speckle interference technology [11] is based on the concept of perfect optics [12], and instead of imaging the intensity distribution of light using a lens, the microstructure is observed by detecting the phase change caused by the lateral shift of the scattered light emitted from each point on the surface of the measurement object that passes through the lens. In this process, the scattered light plays an important role in bringing more information about the shape of the object surface through the lens to the image plane [11].…”

Section: Introductionmentioning

confidence: 99%

“…The current resolution of the speckle deformation measurement is about 5-10 nm [13,14], and this high-resolution analysis technique enables the observation of microstructures [10,11].…”

Section: Introductionmentioning

confidence: 99%

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Shape Measurement Method of Two-Dimensional Micro-Structures beyond the Diffraction Limit Based on Speckle Interferometry

Arai¹

2021

Photonics

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A technique based on speckle interferometry for observing microstructures beyond the diffraction limit by detecting the spatial phase distribution of scattered light from microstructures has previously been reported. In this study, the development of this technique using a two-dimensional method is discussed. In order to observe general two-dimensional images, development of new technology in several stages is required. A two-dimensional filtering technique to reduce the noise component and a two-dimensional integration path to detect the three-dimensional shape of the surface are described in detail. As a first step toward observing complex two-dimensional structures in the future, it is investigated that directional two-dimensional information such as fibrous materials and micro-linear structures can be visually captured and treated as meaningful two-dimensional structures. As a result, it is shown that it is possible to observe fine two-dimensional letters with a line width of 100 nm, which is beyond the diffraction limit of the objective lens, demonstrating the effectiveness of the observation technique for microstructures by phase detection.

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Section: Measurement Optics and Measurement Processmentioning

confidence: 99%

“…If the real part is considered as the cosine component and the imaginary part as the sine component, then based on the addition theorem of trigonometric functions, the difference between the phase distributions of cos (φ 1 − φ 2 ) and sin (φ 1 − φ 2 ) can be obtained as a specklegram, as shown in Figure 3(4) [11]. In this study, instead of using the ratio of cosine and sine to obtain the phase difference φ 1-2 by the arctangent function, the spatial fringe analysis method [23], which can remove the noise component through more detailed processing, was used.…”

Section: Removal Of Bias Component In Speckle Patternsmentioning

confidence: 99%

Section: Setting Up a 2d Integration Pathmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…The current resolution of the speckle deformation measurement is about 5-10 nm [13,14], and this high-resolution analysis technique enables the observation of microstructures [10,11].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations