Based on the Half Mode Substrate Integrated Waveguide (HMSIW) technology, a new type of Gunn DiodeOscillator was developed. Main emphasis was placed on HMSIW resonant cavity structure. Restrictions on the performance of the oscillators imposed by packaged networks and the self-characteristic of the Gunn diode transistor devices have been analyzed. This oscillator's performance is characterized by medium level output power of 13.2dBm, phase noise less than -97.3 dBc/Hz*100 kHz and frequency excursion 40MHz over temperature range from 10°C to 75 "C. It has some advantages such as planar integration, low cost, small size, good temperature-frequency stability, low phase noise.Index Terms-half mode substrate integrated waveguide, resonant cavity, GUNN diode, oscillator.