1997
DOI: 10.1016/s0965-9773(97)00017-2
|View full text |Cite
|
Sign up to set email alerts
|

Microstructural characterization of nanograin tin oxide gas sensors

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
9
0

Year Published

2000
2000
2023
2023

Publication Types

Select...
5
4

Relationship

2
7

Authors

Journals

citations
Cited by 47 publications
(10 citation statements)
references
References 20 publications
1
9
0
Order By: Relevance
“…Various shapes of nanostructured SnO 2 , including nano-particle-based films [12][13][14][15][16], nano-wires [17][18][19], nano-belts [20,21], nano-rods [22], and selfassembled or pattern-transferred nano-porous structures [23,24], were fabricated and studied for their gas-sensing properties. Currently there are several fabrication approaches for preparation of nano-structured SnO 2 for gas detections, such as sol-gel [12,13,15,[25][26][27], pyrolysis [28][29][30], sputtering [14,31], chemical vapor deposition [32], rheotaxial growth and thermal oxidation (RGTO) [33][34][35][36][37][38][39][40][41][42], etc. Among these processes, RGTO, in which SnO 2 is formed by oxidizing metallic tin films deposited on certain substrates in dry environments, has an advantage in obtaining high aspect-ratio nano-structures [33,42] and controlling the particle size distribution [35].…”
Section: Introductionmentioning
confidence: 99%
“…Various shapes of nanostructured SnO 2 , including nano-particle-based films [12][13][14][15][16], nano-wires [17][18][19], nano-belts [20,21], nano-rods [22], and selfassembled or pattern-transferred nano-porous structures [23,24], were fabricated and studied for their gas-sensing properties. Currently there are several fabrication approaches for preparation of nano-structured SnO 2 for gas detections, such as sol-gel [12,13,15,[25][26][27], pyrolysis [28][29][30], sputtering [14,31], chemical vapor deposition [32], rheotaxial growth and thermal oxidation (RGTO) [33][34][35][36][37][38][39][40][41][42], etc. Among these processes, RGTO, in which SnO 2 is formed by oxidizing metallic tin films deposited on certain substrates in dry environments, has an advantage in obtaining high aspect-ratio nano-structures [33,42] and controlling the particle size distribution [35].…”
Section: Introductionmentioning
confidence: 99%
“…The films have a nodular surface structure, in which it is possible to distinguish small granular particles of a few tens of nanometers in diameter Their surface morphology replicates that of the underlying alumina substrate, and the resulting surface roughness increases the effective area of the oxide in contact with the air [77]. A platinum resistance heater and the electrical contacts were deposited by the same method in a pure argon atmosphere.…”
Section: Radio-frequency Sputteringmentioning
confidence: 99%
“…The multisensor was thermally treated in air at 520 • C for 4 h to control the material morphology (stoichiometry and grain size of the tin oxide and dopant distribution) and to stabilise the semiconductor electrical resistance before the measurement. Annealing is fundamental in order to obtain a good detection [15,16]. …”
Section: Multisensor Preparationmentioning
confidence: 99%