Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors

Dahl, Morten M.; Bellou, A.; Bahr, David F.; Norton, M. Grant; Osborne, E. W.

doi:10.1016/j.jcrysgro.2009.01.114

Cited by 28 publications

(10 citation statements)

References 16 publications

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“…The FBR holds the potential to become the dominating CVD reactor for production of solar grade silicon since the energy consumption per kilogram of silicon produced is estimated to be in the range of 4-16 kWh/kg [28,29]; numbers vary depending on the number of steps or energy consuming processes that have been accounted for its calculation. However, it is first necessary to address the challenges with purity and porosity, production of fine dust (fines), and to achieve good gas and temperature control, among others [30,31].…”

Section: Fluidized Bed Reactorsmentioning

confidence: 99%

“…Larger bubbles in silane rich regions of the bed will promote gaseous nucleation and homogeneous growth thus fines production. Fines production is directly a problem because it is a loss mechanism, even if some of the fines may be scavenged and thus not directly lost [30]. However, this contribution comes with a cost since fines scavenging may lead to porous regions, and hydrogen inclusions [50,56,57].…”

Section: Fbrmentioning

confidence: 99%

See 1 more Smart Citation

Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactor

Ramos

Filtvedt

Lindholm

et al. 2015

Journal of Crystal Growth

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Polysilicon production costs contribute approximately to 25-33% of the overall cost of the solar panels and a similar fraction of the total energy invested in their fabrication. Understanding the energy losses and the behaviour of process temperature is an essential requirement as one moves forward to design and build large scale polysilicon manufacturing plants. In this paper we present thermal models for two processes for poly production, viz., the Siemens process using trichlorosilane (TCS) as precursor and the fluid bed process using silane (monosilane, MS). We validate the models with some experimental measurements on prototype laboratory reactors relating the temperature profiles to product quality. A model sensitivity analysis is also performed, and the effects of some key parameters such as reactor wall emissivity, gas distributor temperature, etc., on temperature distribution and product quality are examined. The information presented in this paper is useful for further understanding of the strengths and weaknesses of both deposition technologies, and will help in optimal temperature profiling of these systems aiming at lowering production costs without compromising the solar cell quality.

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Section: Fluidized Bed Reactorsmentioning

confidence: 99%

Section: Fbrmentioning

confidence: 99%

Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactor

Ramos

Filtvedt

Lindholm

et al. 2015

Journal of Crystal Growth

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“…These are especially essential with the complexity and miniaturization of 3D ICs and when experimental techniques can no longer determine the material properties accurately. Many researchers have also employed MD to understand failures and material properties [4,5].…”

Section: Introductionmentioning

confidence: 99%

“…, E of (100)/[011] and (111)/[1][2][3][4][5][6][7][8][9][10] are comparable, ~124 and ~129 GPa respectively, while for (100)/[010], its E is slightly lower, ~101.5 GPa. From literature[12], the elastic constants of bulk Si at 298 K are 130 and 169 GPa for <100> and <110> directions respectively.…”

mentioning

confidence: 99%

An initiative to develop a new approach for fracture characterization of silicon die crack

Lin

Xue

Chai

et al. 2015

2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits

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A new approach for fracture characterization of a particular case study on silicon die crack is presented. It consists of four phases -visual inspection, molecular dynamics, finite element method and experiment. This work aims to use these techniques to investigate and provide a theoretical explanation and analysis of the physical failure modes and mechanisms involved, from the molecular to package level.

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“…The produced polisilicon has grain sizes in the 10s of nm regime. [2] Bead fracture during handling is a problem in processing this material for subsequent solar cell growth because dust can result from grinding while shipping the material in large quantities, which can be hazardous to subsequent users and handling. Most of the fracture behavior studies that have been done on polysilion use nanoindentation, microindentation, or four point and cantilever beam techniques.…”

Section: Introductionmentioning

confidence: 99%

Fracture Behavior of Granular Polycrystalline Silicon Using Micro-scale and Macro-scale Indentation Techniques

Zbib

Bahr

2013

Metallurgical and Materials Transactions E

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Three batches of polycrystalline silicon (polysilicon) produced with the fluidized bed reactor method were used to study the fracture behavior using micro-scale and macro-scale indentation techniques. The fracture toughness was determined to be 0.60, 0.74, and 0.86 MPa m 0.5 using Vickers microhardness tests for three samples with a high, medium, and low hydrogen content, respectively. In the same order of the samples, Rockwell hardness tests showed that they failed at applied loads of 45, 55, and 60 kg, respectively. These results show that the fracture behaviors of both techniques are in agreement; the highest toughness materials can withstand higher loads prior to fracture in the Rockwell hardness test. The microstructure of the granular product has been documented and the only significant difference between the samples is the solute hydrogen content. Therefore, a Rockwell hardness instrument can be used as a rapid way to assess the relative fracture toughness of the as-grown polysilicon for solar applications, and the technique is insensitive to small amounts of porosity in these materials.

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Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors

Cited by 28 publications

References 16 publications

Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactor

Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactor

An initiative to develop a new approach for fracture characterization of silicon die crack

Fracture Behavior of Granular Polycrystalline Silicon Using Micro-scale and Macro-scale Indentation Techniques

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