Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering

Zhou, Tong; Liu, Dawei; Zhang, Ying; Ouyang, Taoyuan; Suo, Jinping

doi:10.1016/j.jallcom.2016.06.278

Cited by 42 publications

(11 citation statements)

References 27 publications

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“…Similar to our previous work, the lowest hydrogen absorption was found for the coating with mixed hcp-Cr 2 N and c-CrN phase composition due to the higher packing density of the cubic structure [13]. Zhou et al [43] observed for titanium nitride coatings that hydrogen impermeability of the coating also depends on the crystal orientation of the films. In order to prove this supposition, the texture coefficients of Cr 2 N T c (hkl) are calculated from their respective XRD peaks using the formula [44]:…”

Section: Crystalline Structuresupporting

confidence: 87%

“…According to this, the coating with strong (110) texture should have the lowest hydrogen permeation. However, it could be suggested that crystal orientation is only one parameter influencing the permeation resistance of coatings together with film structure, presence of mixing phases, and packing density of the structure [13,43]. Hydrogen permeation depends on the crystal orientation within the films.…”

Section: Crystalline Structurementioning

confidence: 99%

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Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

et al. 2018

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In the current work, the microstructure, hydrogen permeability, and properties of chromium nitride (CrN x ) thin films deposited on the Inconel 718 superalloy using direct current reactive sputtering are investigated. The influence of the substrate bias voltage on the crystal structure, mechanical, and tribological properties before and after hydrogen exposure was studied. It was found that increasing the substrate bias voltage leads to densification of the coating. X-ray diffraction (XRD) results reveal a change from mixed fcc-CrN + hcp-Cr 2 N to the approximately stoichiometric hcp-Cr 2 N phase with increasing substrate bias confirmed by wavelength-dispersive X-ray spectroscopy (WDS). The texture coefficients of (113), (110), and (111) planes vary significantly with increasing substrate bias voltage. The hydrogen permeability was measured by gas-phase hydrogenation. The CrN coating deposited at 60 V with mixed c-CrN and (113) textured hcp-Cr 2 N phases exhibits the lowest hydrogen absorption at 873 K. It is suggested that the crystal orientation is only one parameter influencing the permeation resistance of the CrN x coating together with the film structure, the presence of mixing phases, and the packing density of the structure. After hydrogenation, the hardness increased for all coatings, which could be related to the formation of a Cr 2 O 3 oxide film on the surface, as well as the defect formation after hydrogen loading. Tribological tests reveal that hydrogenation leads to a decrease of the friction coefficient by up to 40%. The lowest value of 0.25 ± 0.02 was reached for the CrN x coating deposited at 60 V after hydrogenation.

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Section: Crystalline Structuresupporting

confidence: 87%

Section: Crystalline Structurementioning

confidence: 99%

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

et al. 2018

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“…It could be concluded that the presence of the c-CrN structure is preferable for hydrogen permeation resistant coatings due to a higher packing density of the cubic structure in comparison to the hexagonal structure [ 38 ]. Furthermore, preferred orientation of the deposited films strongly depends on the working pressure and could influence mechanical properties and hydrogen permeation, also [ 39 , 40 ].…”

Section: Resultsmentioning

confidence: 99%

Effect of Hydrogen Exposure on Mechanical and Tribological Behavior of CrxN Coatings Deposited at Different Pressures on IN718

et al. 2017

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In the current study, the properties of the CrxN coatings deposited on the Inconel 718 superalloy using direct current reactive magnetron sputtering are investigated. The influence of working pressure on the microstructure, mechanical, and tribological properties of the CrxN coatings before and after high-temperature hydrogen exposure is studied. The cross-sectional scanning electron micrographs indicate the columnar structure of the coatings, which changes from dense and compact columns to large columns with increasing working pressure. The Cr/N ratio increases from 1.4 to 1.9 with increasing working pressure from 300 to 900 mPa, respectively. X-ray diffraction analysis reveals a change from mixed hcp-Cr2N and fcc-CrN structure to approximately stoichiometric Cr2N phase. After gas-phase hydrogenation, the coating deposited at 300 mPa exhibits the lowest hydrogen absorption at 600 °C of all investigated coatings. The results indicate that the dense mixed cubic and hexagonal structure is preferential for hydrogen permeation resistance due to the presence of cubic phase with higher packing density in comparison to the hexagonal structure. After hydrogenation, no changes in phase composition were observed; however, a small amount of hydrogen is accumulated in the coatings. An increase of coating hardness and elastic modulus was observed after hydrogen exposure. Tribological tests reveal that hydrogenation leads to a decrease of the friction coefficient up to 20%–30%. The best value of 0.25 was reached for hydrogen exposed CrxN coating deposited at 300 mPa.

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“…Among the various PVD methods, the magnetron sputtering technique has a low deposition temperature, large deposition area, low impurity level, high deposition rate and superior bonding strength [10]. Metal or non-metal films can be deposited on substrates by selecting the appropriate sputtering process, different target materials and gas mixture [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates

et al. 2021

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering

Cited by 42 publications

References 27 publications

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

Effect of Hydrogen Exposure on Mechanical and Tribological Behavior of CrxN Coatings Deposited at Different Pressures on IN718

Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates

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