Microstructure and Magnetic Properties of C-Axis-Oriented Mo/NdFeB/Mo Films

To apply Nd–Fe–B thin films for mass-produced heat-assisted magnetic recording media, we investigated the high-rate sputtering conditions required to obtain c-axis textured Nd2Fe14B thin films and analyzed the growth mechanism. Magnetization curves indicated that higher substrate temperatures and sputtering rates resulted in a higher degree of perpendicular magnetic anisotropy; a Nd–Fe–B layer deposited at a substrate temperature (Tsub_0) of 600 °C and a sputtering rate (Rsp) of 2.6 nm/s had the easy axis perpendicular to the film plane. The dependence of the magnetic properties on the sputtering rate was due to a decrease in the substrate temperature during sputtering; there was a threshold for obtaining a high squareness ratio. X-ray diffraction analysis and transmission electron microscopy (TEM) images showed that the c-axis textured Nd2Fe14B crystal phase was formed in the Nd–Fe–B layer deposited at Tsub_0 = 600 °C and Rsp = 2.6 nm/s, which resulted in the highly perpendicular magnetic anisotropy. In addition, the TEM images showed a layer of Nd2Fe14B with no obvious lattice fringes near the interface between the Nd–Fe–B layer and Mo underlayer, while the lattice fringes of the Nd2Fe14B phase were not parallel to this interface but gently curved along the Mo cap layer. We propose that the c-axis orientation was achieved by the rotation of the c plane, which has the lowest surface energy in the Nd2Fe14B phase, toward the vacuum-side surface during sputtering.

show abstract

Fabrication and growth of c-axis textured Nd2Fe14B thin films by high-rate sputtering

Tsuchida

Fukushima

Hinata

et al. 2020

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Microstructure and Magnetic Properties of C-Axis-Oriented Mo/NdFeB/Mo Films

Cited by 1 publication

References 8 publications

Fabrication and growth of c-axis textured Nd2Fe14B thin films by high-rate sputtering

Fabrication and growth of c-axis textured Nd2Fe14B thin films by high-rate sputtering

Contact Info

Product

Resources

About