2017
DOI: 10.1016/j.surfcoat.2016.11.084
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Microstructure and nanomechanical properties of pulsed excimer laser deposited DLC:Ag films: Enhanced nanotribological response

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Cited by 37 publications
(22 citation statements)
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“…The main hindrance to further industrial exploitation of DLC films was poor scratch resistance which led to premature failure, primarily due to the high residual compressive stresses (in the GPa range) trapped during deposition and the ion subplantation process [ 8 ]. To circumvent this brittleness problem and allow for thicker and more stable films several recent studies proposed the doping of DLC with other elements [ 9 , 10 , 11 , 12 , 13 ]. Among the doping elements used were transition metals–typically termed metal containing hydrogenated amorphous carbon films, a–C:H:Me—or non-metal elements–typically termed as modified hydrogenated amorphous carbon films, a–C:H:X—such as silicon, oxygen, boron, nitrogen, and so forth.…”
Section: Introductionmentioning
confidence: 99%
“…The main hindrance to further industrial exploitation of DLC films was poor scratch resistance which led to premature failure, primarily due to the high residual compressive stresses (in the GPa range) trapped during deposition and the ion subplantation process [ 8 ]. To circumvent this brittleness problem and allow for thicker and more stable films several recent studies proposed the doping of DLC with other elements [ 9 , 10 , 11 , 12 , 13 ]. Among the doping elements used were transition metals–typically termed metal containing hydrogenated amorphous carbon films, a–C:H:Me—or non-metal elements–typically termed as modified hydrogenated amorphous carbon films, a–C:H:X—such as silicon, oxygen, boron, nitrogen, and so forth.…”
Section: Introductionmentioning
confidence: 99%
“…Ti [15,16] and Ag [17]. In the case of Ag, the sp 3 content decreased with Ag content, as seen in high resolution XPS spectra [18]. Evaluating the slope of the luminescence background of the Raman spectrum [19], a hydrogen content of the Zn-DLC samples of around 25-30 at.% can be calculated, which is increasing with Zn content.…”
Section: Film Structurementioning
confidence: 90%
“…For films containing up to 10 at.% ZnO particles the hardness was reported to be below 5 GPa [7]. The addition of silver to DLC films lowers the hardness, too [18,20].…”
Section: Hardnessmentioning
confidence: 99%
“…There were C-O bonds of 4.67% in the P-DLC¯lm and we con¯rmed that the presence of oxygen on the surface of the sample was related to some residual contaminations due to air exposure. 22,23 On the other hand, there were only few C¼O (or O-C¼O) bonds in the P-DLC¯lm, and we were sure that the fraction of 0.78% had resulted from the error of the¯tting.…”
Section: Xps Study Of The¯lmsmentioning
confidence: 96%