Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition

Donohue, L.A.; Smith, I.J.; Münz, W.‐D.; Petrov, I.; Greene, J. E.

doi:10.1016/s0257-8972(97)00249-1

Cited by 195 publications

(77 citation statements)

References 9 publications

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“…Due to remarkable physical properties including high hardness and mechanical strength [1][2][3], chemical inertness [4][5][6], thermal stability [7], and electrical conductivity which varies from metallic to semiconducting [8][9][10], transition-metal (TM) nitride thin films are used in a wide range of applications: from wear-resistant protective coatings for cutting tools and engine components [11; 12] to diffusion barriers in electronic devices [13]. The actual properties achieved by a given TM nitride film depend in large part on surface and microstructural evolution during reactive growth.…”

Section: Introductionmentioning

confidence: 99%

Ab initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces

et al. 2014

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Ab-initio molecular dynamics (AIMD) simulations based on density functional theory show that N adatoms are chemisorbed in threefold sites close to a N surface atom and between the two diagonally-opposed neighboring Ti surface atoms on TiN(001). The most probable N adatom reaction pathway, even in the presence of nearby N adatoms, is for the N adatom and N surface atom pair to first undergo several exchange reactions and then desorb as a N2 molecule, resulting in a surface anion vacancy, with an activation barrier Edes of 1.37 eV and an attempt frequency Ades = 3.4x10 13 s -1 . Edes is essentially equal to the N adatom surface diffusion barrier, Es = 1.39 eV, whileAs is only three to four times larger than Ades, indicating that isolated N adatoms migrate for only short distances prior to N2 desorption. The probability of N2 desorption via recombination of N adatoms on TiN(001) is much lower due to repulsive adatom/adatom interactions at separations less than ~3 Å which rapidly increase to ~2 eV at a separation of 1.5 Å. We obtain good qualitative and quantitative agreement with the above results using the modified embedded atom method (MEAM) potential to perform classical molecular dynamics (CMD) simulations.

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Section: Introductionmentioning

confidence: 99%

Ab initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces

et al. 2014

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“…The superior drilling performance of the multilayer TiAlCrSiN coating compared with those of the single layer TiAlN and TiAlSiN coatings can be attributed to more favorable mechanical (high hardness) and tribological (low friction) properties, and wear resistance. The performance was likely enhanced by the incorporation of Cr into the multilayer TiAlSiN coating [19][20][21][22]. The low friction coefficient suggests that the decreased friction between the tool and chip in machining and a reduced tendency to stick and pick up material from the counterpart material, led to the extended service life of the cutting tool.…”

Section: Performance Of Single Layer and Multilayer Coatings In Drillingmentioning

confidence: 99%

“…The potential for low friction coefficients and high resistance to abrasive wear are important characteristics for high-speed and hard material cutting applications. In investigations that have aimed to increase the wear resistance and tribological properties of TiAlSiN coatings for wet cutting applications, improved tribological properties have been achieved through the incorporation of chromium (5-10 at%) into PVD TiAlSiN coatings [19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Wang¹,

Miyake²

2018

Lubrication - Tribology, Lubricants and Additives

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The current topics related to the morphology and tribology of TiAlN monolayer, TiAlN/ SiNx, TiAlN/CNx and TiAlN/CNxAECNx nanoscale multilayer coatings and refer to our recent results on the evaluation of surface morphology, and nanoscale mechanical and tribological properties of coatings deposited on cemented carbide cutting tools and silicon wafer substrates by reactive magnetron sputtering deposition. The surface morphology and microstructure of the coatings were evaluated with an atomic force microscope in dynamic friction mode together with transmission electron microscope imaging. The tribological properties of the coatings were evaluated by pin-on-disc friction testing in dry air, and high-frequency linear-oscillation friction testing under various lubrication conditions. The tribological properties of the multilayer TiAlCrSiN and TiAlSiN coatings were compared with those of a single layer TiAlN coating to evaluate their possible applications to the surfaces of cutting tools. The machining performances of single layer TiAlN, multilayer TiAlSiN, and TiAlCrSiN coated drills were investigated in drilling of carbon steel.

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“…Эти свойства сильно зависят от фазового состава и термической ста-бильности отдельных фаз, из которых состоит плёнка. Поэтому не удивительно, что при получении твёрдых плёнок со стойкостью к высокотемпературному оксидированию их фазовый состав варьи-ровал от TiC (400С) через TiN (650С) до (Ti, Al)N (850С) и на-конец до (Ti, Al, Y)N (930С) [1][2][3]. Также стойкость нанокомпо-зитов типа ncTiN-Si 3 N 4 к оксидированию с низким содержанием (10 ат.%) Si не превышает 1000С [4], здесь nc и а обозначают на-нокристаллические и аморфные фазы, соответственно.…”

Section: физические свойства и стойкость к высокотемпературному оксидunclassified

“…Необходимо дальнейшее исследо-вание этих плёнок с помощью HRTEM, чтобы ответить на этот вопрос. Mo-Si-N, однако, менее пластичны по сравнению с плёнками W-Si-N, которые напыляли с мишени WSi [2,16]; см. рис.…”

Section: элементный и фазовый составunclassified

Structure, Properties and Fabrication of the Solid Nanocrystalline Coatings Deposited in Several Ways

Beresnev¹,

Pogrebnyak

Azarenkov

et al. 2007

Usp. Fiz. Met.

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Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition

Cited by 195 publications

References 9 publications

Ab initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces

Ab initio and classical molecular dynamics simulations of N2 desorption from TiN(001) surfaces

Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Structure, Properties and Fabrication of the Solid Nanocrystalline Coatings Deposited in Several Ways

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