Microstructure and tribological properties of SiOx/DLC films grown by PECVD

Yang, Won Jae; Sekino, Tohru; Shim, Kwang Bo; Niihara, Koichi; Auh, Keun Ho

doi:10.1016/j.surfcoat.2004.05.023

Cited by 65 publications

(38 citation statements)

References 23 publications

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“…D peak is due to the breathing modes of sp 2 atoms in the rings. T peak is due the C-C sp 3 vibration [53] .…”

Section: Stucture and Composition Of Dln Composite Filmsmentioning

confidence: 98%

“…These precursors might be gaseous (Silane -(SiH4) and oxygen (O2) mix) [44] , tetra methyle silane-TMS ((CH3)3SiH and oxygen mix) [45] or liquids Hexamethyle disiloxane HMDSO (C6H18OSi2) [46][47][48][49][50][51] , or tetraethoxysilane (TEOS, (C2H5O)4Si [52] , or tetraethylorthosilicate-TEOS (SiC8H20O4) [53,54,21] , hexa methyle disilane-HMDS (C6H18Si2) [55] and mixed siloxane and silazane precursors.…”

Section: Precursorsmentioning

confidence: 99%

“…So, instead SiH4, HMDSN, HMDSO are commonly used as precursor liquid now a days due to its less toxicity and flammability. [53] .…”

Section: Precursorsmentioning

confidence: 99%

“…Stress can be further decreased by increasing the Si atomic concentartion [52] . Hardness and young modulus are decreased in DLN film in comparison with DLC film [22,45,46,53,54,58,59] .…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…Lowest and highest reported coefficient of friction ranges were reported as 0.04-0.08 and 0.1-0.2 respectively. Friction coefficient depends upon substrate bias [53] . Friction of coefficient <0.05 was reported when substrate bias was in between -100V to -200V and coefficient of friction increased >2 times with increase of substrate bias up to -500V.…”

Section: Coefficient Of Friction and Wear Resistancementioning

confidence: 99%

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Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Adhikary¹,

Das

De³

et al. 2018

CAN

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Diamond-like Nanocomposites (DLN) is a newly member in amorphous carbon (a:C) family. It consists of two or more interpenetrated atomic scale network structure. The amorphous silicon oxide (a:SiO) is incorporated within diamond-like carbon (DLC) matrix i.e. a:CH and both the network is interpenetrated by Si-C bond. Hence, the internal stress of deposited DLN film decreases remarkably compare to DLC. The diamond like properties has come due to

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“…D peak is due to the breathing modes of sp 2 atoms in the rings. T peak is due the C-C sp 3 vibration [53] .…”

Section: Stucture and Composition Of Dln Composite Filmsmentioning

confidence: 98%

Section: Precursorsmentioning

confidence: 99%

“…So, instead SiH4, HMDSN, HMDSO are commonly used as precursor liquid now a days due to its less toxicity and flammability. [53] .…”

Section: Precursorsmentioning

confidence: 99%

“…Stress can be further decreased by increasing the Si atomic concentartion [52] . Hardness and young modulus are decreased in DLN film in comparison with DLC film [22,45,46,53,54,58,59] .…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Section: Coefficient Of Friction and Wear Resistancementioning

confidence: 99%

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