In this paper, the two-dimensional (2D) (0 • /90 • ) plain-woven Amosic-3 SiC/SiC turbine guide vane (TGV) was fabricated using the chemical vapor infiltration method. Thermal and stress analysis of the TGV was conducted using the finite element method analysis. Multiple thermal shock tests at T = 1250, 1350, 1400, 1420, 1450, 1470, and 1480 • C were conducted for N = 100, 100, 400, 300, 200, 200, and 700 cycles. After thermal shock tests, the surface damage of the TGV was observed visually, and the micro damage mechanism was analyzed using the scanning electronic microscopy. Micro X-ray computed tomography was adopted to characterize the internal damages in the SiC/SiC guide vanes. The delamination occurred at the positions approaching internal hollow, due to the weak binding force along the thickness direction and the high thermal shock stress caused by the temperature change. The diameter, area, volume, and sphericity distributions of the pores inside of the guide vanes were also obtained.