Microstructure, mechanical properties and cutting performance of superhard (Ti,Si,Al)N nanocomposite films grown by d.c. reactive magnetron sputtering

Abstract

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Plasma enhanced magnetron sputter deposition of Ti–Si–C–N based nanocomposite coatings

“…Other groups have also studied the Ti-Si-N system and other ternary, quaternary, or even pentanary systems [25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41]. The high hardness of these nanocomposite coatings has already demonstrated superb properties for tribological applications such as in high speed, dry cutting and drilling [42][43][44] and on aero engine turbine blades against severe erosion [45][46][47][48].…”

“…On the other hand, various PVD processes have also been developed including ion beam assisted deposition [30], magnetron sputtering [16][17][18][19][20][21][22][23][24][25][26][27]29,[31][32][33][34][35][37][38][39][40][41][43][44][45][46][47][48], cathodic arc deposition [28,36,58] and hybrid deposition using both magnetron sputtering and arc evaporation [56,57]. Recent reviews on various deposition technologies can be found in refs.…”

Properties of magnetron sputtered Al–Si–N thin films with a low and high Si content

“…No detailed investigation of the Al-Si-N system has been carried out so far. To our knowledge, only Ti-Si-Al-N [20][21][22], Ti-Al-V-Si-N [21], Ti-Cr-Al-Si-N [23] nitride thin films with a low (≤10 at.%) Si content have been investigated so far. These systems, however, also do not exhibit the thermal stability and oxidation resistance above 1000°C because a low amount of Si prevents the formation of amorphous Al-Si based materials [24].…”

Microstructure, Mechanical Properties and Corrosion Resistance of Nanocomposite Coatings Deposited by PVD Technology

“…The coatings of such structure are able to maintain a low friction coefficient (selflubricating coatings) in numerous working environments, maintaining high hardness and increased resistance (Donnet & Erdemir, 2004;. The main concept in the achievement of high hardness of nanostructure coatings and good mechanical properties and high strength related to it, particularly in case of nanocomposite coatings (Holubar et al, 2000;Rafaja et al, 2007;Carvalho et al, 2004), is the restriction of www.intechopen.com Advances in Diverse Industrial Applications of Nanocomposites 2 the rise and the movement of dislocations. High hardness and strength of the nanocomposite coatings are due to the fact that the movement of dislocations is suppressed at small grains and in the spaces between them, which causes the appearance of incoherent deformations.…”

“…Various analyses revealed that the synthesized TiAlSiN coatings exhibited nanostructured composite microstructures consisting of solid-solution (Ti,Al,Si)N crystallites and amorphous Si 3 N 4 . The Si addition caused the grain refinement of (Ti,Al,Si)N crystallites and its uniform distribution with percolation phenomenon of amorphous silicon nitride (Zhang & Ali, 2007;Holubar et al, 2000;Rafaja et al, 2007;Carvalho et al, 2004). One of the general reasons for depositing by PVD techniques is that protective coatings deposited by PVD tend to have higher corrosion resistance than the substrate material.…”