Plasma enhanced magnetron sputter deposition of Ti–Si–C–N based nanocomposite coatings

Wei, Ronghua

doi:10.1016/j.surfcoat.2008.05.019

Cited by 71 publications

(31 citation statements)

References 77 publications

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“…4, respectively. According to the relationship between peak target current and pulse voltage reported by J. Alami, 33 it follows a power law as formula (1).…”

Section: A the Influence Of Superimposed DC Current On Target Currenmentioning

confidence: 99%

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The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

et al. 2018

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The electrical characteristics and spectroscopic properties have been comprehensively investigated in a DC superimposed high power impulse magnetron sputtering (DC-HiPIMS) deposition system in this paper. The influence of superimposed DC current on the variation of target and substrate current waveforms, active species and electron temperatures with pulse voltages are focused. The peak target currents in DC-HiPIMS are lower than in HiPIMS. The time scales of the two main discharge processes like ionization and gas rarefaction in DC-HiPIMS are analyzed. When the pulse voltage is higher than 600 V, the gas rarefaction effect becomes apparent. Overall, the ionization process is found to be dominant in the initial ∼100 μs during each pulse. The active species of Ar and Cr in DC-HiPIMS are higher than in HiPIMS unless that the pulse voltage reaches 900 V. However, the ionization degree in HiPIMS exceeds that in DC-HiPIMS at around 600 V. The electron temperature calculated by modified Boltzmann plot method based on corona model has a precipitous increase from 0.87 to 25.0 eV in HiPIMS, but varies mildly after the introduction of the superimposed DC current. Additionally, the current from plasma flowing to the substrate is improved when a DC current is superimposed with HiPIMS.

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“…4, respectively. According to the relationship between peak target current and pulse voltage reported by J. Alami, 33 it follows a power law as formula (1).…”

Section: A the Influence Of Superimposed DC Current On Target Currenmentioning

confidence: 99%

“…Microstructure control is of critical importance in the fabrication of hard yet tough as well as dense nanocomposite coatings, [1][2][3] which are potentially able to satisfy the hash wear and corrosion resistant demands in marine applications. 4,5 According to the extended structure zone diagram proposed by A.…”

Section: Introductionmentioning

confidence: 99%

The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

et al. 2018

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“…In general, low E* is desirable, as it allows the load to be distributed over a wider area [35]. Besides, R. Wei revealed that the value H 3 /E* 2 can also be applied to assess the toughness of a coating or resistance to crack formation and propagation [36]. As a result, the protective efficiency of the films exposed to the external load increases with the increasing amount of Cr addition.…”

Section: Microstructures and Phase Analysismentioning

confidence: 99%

Effect of Cr alloying on friction and wear of sputter-deposited nanocrystalline (MoxCr1−x)5Si3 films

Xie

Munroe

2011

Intermetallics

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“…[7] also reported that the TiSi(12 at.%)CN coatings presented the highest hardness of 4100 HV as compared with TiSi(6 at.%~8 at.%)N coating (3700 HV), and the oxidation stability temperature for the TiSi(4 at.%)CN coating also upped to 900 °C. In addition, the influence of carbon content (6.9 -22.2 at.%) on microstructure and mechanical property also was discussed [6], the nanocrystallite of TiN, TiC and Ti(C, N) was formed in TiSiCN coating as well as a-Si3N4, a-SiC and little a-C, the maximum hardness of 39.8 GPa was obtained for TiSiCN coating at a carbon content of 11.9 at.%.…”

Section: Introduction mentioning

confidence: 99%

“…In terms of tribological properties of TiSiCN coating, the friction behavior in air was usually improved due to the lubrication of amorphous carbon phase by graphitization. For example, with an increase in carbon content, the friction coefficient of the TiSiCN coatings decreases from 0.51 to 0.16 as sliding against ZrO2 balls, which was attributed to the low shear strength of the graphitic sp 2 clusters embedded in the amorphous carbon [6]. When the tribo-test was performed in water, the low fiction coefficient and wear rate also were obtained because of the lubrication of hydrated silica gel that generated from frictional oxidation of silicides [9,10].…”

Section: Introduction mentioning

confidence: 99%

Electrochemical and Tribological Properties of TiSiCN Coatings in Coolant

Zhou

2019

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TiSiCN coatings were prepared using DC and RF magnetron co-sputtering system. The influence of target powers on phase structures, mechanical properties, tribological and electrochemical properties were studied. The results indicated the coatings presented an amorphous structure, and the highest microhardness of 1566.4 HV was obtained at a target power of 200 W. In terms of the electrochemical properties in coolant, the higher charge transfer resistance of 2.64 × 10 7 Ωcm 2 and the polarization resistance (~1.10 × 10 8 kΩ.cm 2) were obtained at low target power, indicating a better corrosion resistance. Furthermore, the friction coefficient was 1.01 ~ 1.14 as sliding against SUS440C balls in air. In contrast, the friction coefficient decreased to 0.45 ~ 0.58 in coolant, and the wear mechanism changed from oxidation wear into abrasive wear.

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Plasma enhanced magnetron sputter deposition of Ti–Si–C–N based nanocomposite coatings

Cited by 71 publications

References 77 publications

The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge

Effect of Cr alloying on friction and wear of sputter-deposited nanocrystalline (MoxCr1−x)5Si3 films

Electrochemical and Tribological Properties of TiSiCN Coatings in Coolant

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