Superconducting films were grown by DC magnetron sputtering of a stoichiometric target at varied pressure (p =5-100 Pa) of argon/oxygen mixture and substrate (MgO(100), , ) temperature K. Film axis orientation and crystal quality were investigated using Raman spectroscopy and medium energy ion backscattering technique. The pressure and substrate temperature determine the growth rate and the crystallographic orientation of YBCO films. At a critical value of about 1.5-2.0 nm , films of mixed orientation are formed. At higher than the critical value, the films show orientation, and growth at rates lower than 1.5 nm gives -oriented films. Correspondingly, at low nm , truly epitaxial films are formed and this kind of structure may be preserved up to 1-m film thickness. A kinetic study allowed estimating the coefficients of surface diffusion in the indicated temperature range: , and . The data obtained are discussed and compared with the known values.