Microwave Dielectric Spectroscopy of Ferroelectric Thin Films

Abstract

We devised a measurement method of microwave dielectric constants of dielectric thin films without applying electrodes. The method uses a rectangular waveguide in which the dielectric thin films prepared on a substrate are filled vertically at the center. The frequency dependence of S-parameter measured by network analyzer enables us to calculate the dielectric constant and loss factor of the films at the microwave region through simulation. We prepared Ba0.6Sr0.4TiO3 thin films on (001) MgO single crystal substrate by pulsed laser deposition (PLD), and determined their dielectric constant and loss factor at ∼10GHz using this method.

Microwave study of ferroelectrics in waveguide

“…Different methods of ferroelectrics film study materials to be studied [14]. Such techniques can be adapted for the measurement of layered structures where properties of one layer are unknown and to be determined.…”

Microwave methods of ferroelectrics and related materials investigation

“…Common techniques for studying dielectric materials in the waveguide usually rely on the measurement of complex scattering parameters of the waveguide which is filled with materials to be studied [14). Such techniques can be adapted for the measurement of layered structures where properties of one layer are unknown and to be determined.…”