Microwave Heating of Thin Au Film

Abstract

Thin Au film was prepared by sputtering and evaporation methods with a quartz substrate, followed by microwave irradiation in air (frequency of microwave: 2.45 GHz, incident flux of microwave: 563 W, irradiation time: 600 s). As a result, it was confirmed that microwave heating of thin Au film is feasible. The growth of crystalline and particles due to microwave heating was confirmed from AFM observation and XRD analysis.Thin Au film is continuously heated during microwave irradiation, regardless of a preparation method of thin film. Microwave heating depends on the amount of microwave absorption on a thin Au film, which is related to the thickness and microstructure of the thin Au film. The rate of temperature rise depends on the ratio of a thickness to resistivity of thin Au film.

Microwave Heating of Thin Cu Film

“…0.3 ..... ------------ Figure 14 shows a relationship between t..T obtained by substituting R=0.45, P=0.5, / 0 =40 nm and ~393 J/(mK) [16] into eqs. ( 7), (8) and ( 9) and L/ p in thin Cu film. As shown in Fig.…”

“…In the case of thin Cu film with a large thickness, no temperature detection appeared as shown in Figs. (5) and (8). This arises from very large Lip.…”

“…Novel microwave measurement technique involving the transmission of a microwave signal through a resistive film has been demonstrated in order to measure the sheet resistance of thin metal films [7]. The authors have reported microwave application for heating of a thin Au film used in a surface plasmon resonance analysis [8]. However, there have been few reports regarding microwave heating of thin metal film, and also its mechanism has not been well understood.…”

Microwave processing - A new dimension in synthesis of materials

“…In another case, metallic (gold) thin films, prepared by sputtering or evaporation were, successfully heated by MW processing. The rise in temperature was a function of thickness, resistivity and microstructure of the films [37].…”

Microwave assisted low temperature encapsulation of Ag films by Cu reactions using Ag–Cu alloy structures

“…Typically bulk metals are excellent reflectors of microwave energy and thus are not heated by microwaves. However, previous studies have showed that thin films of gold continuously absorb microwave radiation and are heated successfully [5]. This is because the microwave penetration depths (skin depth) for most metals range only a few nanometers.…”