Microwave plasma treatment of polymer surface for irreversible sealing of microfluidic devices

Hui, Alex; Wang, Gang; Lin, Baiquan; Chan, Wing-Shing

doi:10.1039/b504271b

Cited by 53 publications

(50 citation statements)

References 15 publications

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“…QA = 2 corresponds to permanent adhesion, QA = 1 corresponds to permanent adhesion, partially distributed throughout the contact interfaces, and QA = 0 corresponds to reversible or no adhesion becoming apparent. The use of GHz plasma generator (Ginn and Steinbock 2003;Hui et al 2005) on the other hand, results in relatively fast sample heating, which may prove detrimental for the fabrication procedures.…”

Section: Plasma Treatments and Quality Of Adhesionmentioning

confidence: 99%

“…Oxidative conversion of the methylsiloxane to siloxy functionality (Si-CH 3 ? Si-O -) provides means for covalent crosslinking between the two substrates, when brought in contact (Hui et al 2005;Morra et al 1990;Chaudhury and Whitesides 1992). A nucleophilic siloxy oxygen from one of the substrates attacks an electrophilic silicon from the other, forming a covalent bond across the interface between the two materials.…”

Section: Introductionmentioning

confidence: 99%

“…The fabrication of microdevices, comprising PDMS components, involves controlled oxidation of the dimethylsiloxane surfaces to ensure a permanent adhesion to other silica-based substrates (Millare et al 2008;Bhattacharya et al 2005;Hui et al 2005). Oxidative conversion of the methylsiloxane to siloxy functionality (Si-CH 3 ?…”

Section: Introductionmentioning

confidence: 99%

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Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Chau

Millare

Lin

et al. 2010

Microfluid Nanofluid

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Controlled surface oxidation of polydimethylsiloxane (PDMS) is essential for permanent adhesion between device components composed of this elastomer. The permanent adhesion between such microdevice components results from covalent crosslinking across the interfaces between PDMS and other silica-based materials, such as glass, quartz, and PDMS. Optimal duration and conditions of oxidation, attained via treatments with oxygen-containing plasma, are crucial for microfabrication procedures with quantitative yields. While insufficient PDMS oxidation does not provide high enough surface density of siloxyl groups for cross-interface linking, overoxidation of PDMS yields rough silica surface layers that prevent the adhesion between flat substrates. Ideally, for a set of plasma conditions, the range of treatment durations producing permanent adhesion should be as broad as possible: i.e., the surface oxidation of PDMS sufficient for irreversible binding has to complete significantly before the effects of overoxidation become apparent. Such a requirement assures that relatively small fluctuations in the treatment conditions will not result in over-or under-oxidation and, hence, will not compromise the yields of the fabrication procedures. We examined the dependence of the quality of adhesion (QA) between plasma-treated PDMS and glass substrates on the composition of the oxygen-containing plasma and on the radio frequency (RF) of the plasma generator. We observed that plasma generated at megahertz RF provided superior conditions than kilohertz RF. Concurrently, an increase in the oxygen content of binary gas mixtures, used for the plasma, broadened the treatment durations that afford superior QA.

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Section: Plasma Treatments and Quality Of Adhesionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Chau

Millare

Lin

et al. 2010

Microfluid Nanofluid

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“…On account of the good control over nanostructure's shape and size distribution and considering that similar products were previously prepared via hydrothermal treatment at 200 °C in 72 h, the efficiency of microwave heating applied to these syntheses results clear (Polshettiwar et al, 2009;Varma & Nadagouda, 2007). Polymer surface modification has been performed by a microwave induced plasma treatment (Leonelli & Mason, 2010): to cite an example, poly(dimethylsiloxane) (PDMS) slabs were irreversibly sealed within 30-60s by means of a 30 W plasma generated in glass bottles containing 2-3 Torr of oxygen (Hui et al, 2005). Similar procedures are reported in papers dealing with modification of PDMS surface hydrophilicity (Ginn & Steinbock, 2003) and polyaniline-aided welding of high density poly(ethylene) (Wu & Benatar, 1997).…”

Section: Polymer Processingmentioning

confidence: 99%

Synthesis and processing of biodegradable and bio-based polymers by microwave irradiation

Frediani¹,

Giachi²,

Rosi³

et al. 2011

Microwave Heating

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“…All AFM tests were carried out within 1 h after exposure to the oxygen plasma. The root mean square ͑rms͒ roughness was measured on the area without the nanocracks, 23 which was formed due to the oxygen plasma treatment. However, these nanocracks can be useful.…”

Section: ͑2͒mentioning

confidence: 99%

Oxygen plasma treatment for reducing hydrophobicity of a sealed polydimethylsiloxane microchannel

et al. 2010

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Rapid prototyping of polydimethylsiloxane ͑PDMS͒ is often used to build microfluidic devices. However, the inherent hydrophobic nature of the material limits the use of PDMS in many applications. While different methods have been developed to transform the hydrophobic PDMS surface to a hydrophilic surface, the actual implementation proved to be time consuming due to differences in equipment and the need for characterization. This paper reports a simple and easy protocol combining a second extended oxygen plasma treatments and proper storage to produce usable hydrophilic PDMS devices. The results show that at a plasma power of 70 W, an extended treatment of over 5 min would allow the PDMS surface to remain hydrophilic for more than 6 h. Storing the treated PDMS devices in deionized water would allow them to maintain their hydrophilicity for weeks. Atomic force microscopy analysis shows that a longer oxygen plasma time produces a smoother surface.

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Microwave plasma treatment of polymer surface for irreversible sealing of microfluidic devices

Cited by 53 publications

References 15 publications

Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Synthesis and processing of biodegradable and bio-based polymers by microwave irradiation

Oxygen plasma treatment for reducing hydrophobicity of a sealed polydimethylsiloxane microchannel

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