Mid-Infrared Electro-Optical Modulation Using Monolithically Integrated Titanium Dioxide on Lithium Niobate Optical Waveguides

Jin, Tan; Zhou, Junchao; Lin, Pao Tai

doi:10.1038/s41598-019-51563-5

Cited by 18 publications

(3 citation statements)

References 28 publications

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“…This way, an effective rib waveguide is formed, where part of the optical mode is confined in the LN slab and can access its unique material properties. Various loading materials have been used, including SiN x [17,25,[99][100][101][102], TiO 2 [96,103], chalcogenide glass [104], Ta 2 O 5 [105], and Si [97,106].…”

Section: Hybrid Waveguidesmentioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in our cell phones. This half-century-old material is currently embracing a revolution in thin-film LN integrated photonics. The success of manufacturing wafer-scale, high-quality, thin films of LN on insulator (LNOI), accompanied with breakthroughs in nanofabrication techniques, have made high-performance integrated nanophotonic components possible. With rapid development in the past few years, some of these thin-film LN devices, such as optical modulators and nonlinear wavelength converters, have already outperformed their legacy counterparts realized in bulk LN crystals. Furthermore, the nanophotonic integration enabled ultra-low-loss resonators in LN, which unlocked many novel applications such as optical frequency combs and quantum transducers. In this Review, we cover-from basic principles to the state of the art-the diverse aspects of integrated thinfilm LN photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optics. We also identify challenges that this platform is currently facing and point out future opportunities. The field of integrated LNOI photonics is advancing rapidly and poised to make critical impacts on a broad range of applications in communication, signal processing, and quantum information.

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Section: Hybrid Waveguidesmentioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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“…Detail performance of operation wavelength, Vπ • L, ER, 3-dB EO bandwidth and IL in mid-IR modulators for various materials platforms, such as silicon nitride on insulator (SiNOI), silicon on lithium niobate (SiLN), germanium on silicon (GeOS is), aluminum nitride (AlN) on insulator, titanium dioxide on insulator (TOI), and titanium dioxide (TOL) on LN. These modulation devices [4], [9], [11], [39]- [45] based on electroabsorption or EO effect have relatively low modulation bandwidth and relatively large insertion loss. Compared to other works on mid-IR EO modulators, as shown in the table 1, our theoretical demonstration results make the progress especially for the voltage-length product and the EO bandwidth.…”

Section: Resultsmentioning

confidence: 99%

Design of High-Speed Mid-Infrared Electro-Optic Modulator Based on Thin Film Lithium Niobate

Shang

Lin

et al. 2022

IEEE Photonics J.

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It is particularly important to improve the performance of mid-infrared (mid-IR) electro-optic (EO) modulator, which is one of the key devices that will expand the channels of optic communication, and will be utilized in optical free space communication, optical detection for gas molecules, etc. We present and theoretically design the performance of the highspeed mid-IR EO modulator based on lithium niobate on insulator (LNOI) at λ=3μm. We have designed, calculated, and optimized single-mode ridge waveguide, 1 × 2 multimode interference (MMI) couplers and coplanar waveguide (CPW) electrodes structures for x-cut lithium niobate. Our device with an extinction ratio greater than 40 dB, a half-wave voltage-length product is about 12 V•cm, and a EO bandwidth up to 12 GHz with interaction length of 15 mm. The performance of interaction length of 5 mm and 10 mm mid-IR EO modulator are also proposed and simulated for a compromise consideration between the EO bandwidth and driving voltage.

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“…They do not make the NbN superconducting properties poorer. The technologies for fabrication of hybrid waveguides on LiNbO 3 substrates using these materials were experimentally demonstrated [30]- [32].…”

Section: Design Of Hybrid Ln-sspdmentioning

confidence: 99%

Design of Hybrid Waveguide Structures for High-Efficiency Integrated Optical Superconducting Single Photon Detectors On Ti:LiNbO₃Waveguides

et al. 2021

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A configuration of integrated optical superconducting single photon detectors on lithium niobate substrates based on conventional titanium in-diffused waveguides with hybrid waveguide structures for enhancing the detector efficiency is proposed and analyzed. The sensing element in the form of a meander-like superconducting nanowire from niobium nitride is covered with an additional hybrid waveguide from a dielectric material with a higher refractive index than the LiNbO 3 substrate to increase the light absorption. A special mode converter in the region free from a superconducting nanostructure is used to excite a localized mode with the maximum absorption coefficient that strongly interacts with the superconductive nanostructure. Silicon and titanium dioxide are considered and compared as suitable materials for the hybrid waveguide structures. Silicon based structures give a higher light concentration and, hence, a higher absorption coefficient. However, they are very demanding to the technological accuracy. Titanium dioxide structures potentially can be produced by the standard thin-film deposition technique and contact photolithography. The estimated absorption coefficient of 1.31 dB/µm is four orders of magnitude higher than that for the detectors with a standard titanium in-diffused waveguide, and a high transformation mode efficiency opens a way for fabrication of integrated optical superconducting single photon detectors with the efficiency comparable with other competing material platforms.

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Mid-Infrared Electro-Optical Modulation Using Monolithically Integrated Titanium Dioxide on Lithium Niobate Optical Waveguides

Cited by 18 publications

References 28 publications

Integrated photonics on thin-film lithium niobate

Integrated photonics on thin-film lithium niobate

Design of High-Speed Mid-Infrared Electro-Optic Modulator Based on Thin Film Lithium Niobate

Design of Hybrid Waveguide Structures for High-Efficiency Integrated Optical Superconducting Single Photon Detectors On Ti:LiNbO₃Waveguides

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Mid-Infrared Electro-Optical Modulation Using Monolithically Integrated Titanium Dioxide on Lithium Niobate Optical Waveguides

Cited by 18 publications

References 28 publications

Integrated photonics on thin-film lithium niobate

Integrated photonics on thin-film lithium niobate

Design of High-Speed Mid-Infrared Electro-Optic Modulator Based on Thin Film Lithium Niobate

Design of Hybrid Waveguide Structures for High-Efficiency Integrated Optical Superconducting Single Photon Detectors On Ti:LiNbO3Waveguides

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Design of Hybrid Waveguide Structures for High-Efficiency Integrated Optical Superconducting Single Photon Detectors On Ti:LiNbO₃Waveguides