2015
DOI: 10.1109/tmech.2015.2417776
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Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability

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Cited by 36 publications
(7 citation statements)
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“…Taking φ = 0 as the reference point, setting φ = π/25 = 0.02 × 2π requires moving the mirror along Oy by 0.02 λ L = 15.4 nm. This is within the range of the current technology which allows precise and stable nanometer positioning [35,36]. Fixing γ = 0.98 requires fixing the ratio of the Rabi frequencies with a precision better than 2%.…”
Section: Feasibilitymentioning
confidence: 87%
“…Taking φ = 0 as the reference point, setting φ = π/25 = 0.02 × 2π requires moving the mirror along Oy by 0.02 λ L = 15.4 nm. This is within the range of the current technology which allows precise and stable nanometer positioning [35,36]. Fixing γ = 0.98 requires fixing the ratio of the Rabi frequencies with a precision better than 2%.…”
Section: Feasibilitymentioning
confidence: 87%
“…The tubular PM linear oscillating actuator (LOA) is an electromagnetic system that is used to provide linear reciprocating thrust force. It has gained increasing research interest due to its high efficiency and wide range of applications [1,2]. Prior to this, linear actuators having crankshaft mechanisms are employed in conventional linear compressors, installed in household refrigerators.…”
Section: Introductionmentioning
confidence: 99%
“…Together with other benefits inherited by the parallel kinematic configuration such as closed-loop structure architecture, high non-actuating stiffness, and less sensitive to external disturbances etc., the compliant parallel mechanism (CPM) is widely preferred over its serial counterpart [1]. For the past two decades, CPM has become a potential solution for various applications such as nanopositioning actuators [2,3], precision manipulators [4][5][6][7][8][9][10][11][12][13][14][15] and MEMS devices [16][17][18]. In particular, numerous manipulators with different degrees-of-freedom (DOF), e.g., 1-DOF [4], 2-DOF linear-motion [5][6][7], 3-DOF planar-motion [8][9][10], 3-DOF spatial-motion [11][12][13] and 6-DOF [14,15], have been developed for a variety of industrial applications such as micro/nano fabrication/assembly systems, manipulation of cells, micro surgery and optical alignment devices, etc.…”
Section: Introductionmentioning
confidence: 99%
“…2b. The geometrical parameters of the beam element are given as: L, b, and t represent the length, width and thickness respectively, A = bt is the area of the rectangular cross section, J = bt 3 3 is the torsion constant when b t, I y = bt 3 12 and I z = b 3 t 12 represents the moments of inertia about the Y and Z axes respectively. After substituting Eqs.…”
Section: Introductionmentioning
confidence: 99%