Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL<sub>2</sub>O<sub>3</sub>/SI Substrates for Smart Devices

Ito, M.; Takabe, M.; Otonari, M.; Akai, Daisuke; Okada, Nagaya; Sawada, Kazuaki; Ishida, M.

doi:10.1109/sensor.2007.4300370

Cited by 1 publication

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“…Although the ability of the developed hydrophone array and measurement system has been demonstrated, the quality of the images was insufficient for a commercial equipment. The fabricated hydrophone array shows high receiving sensitivity in the frequency range from 1 to 15 MHz compared with a conventional PVDF hydrophone [17].…”

Section: Hydrophone Arraymentioning

confidence: 99%

“…The epitaxial PZT (111) film shows higher saturation polarization and remnant polarization than the polycrystalline PZT film. Typical values of remnant polarization (2Pr) of epitaxial and polycrystalline PZT are 75.0 µC/cm 2 and 59.6 µC/cm 2 , respectively, at a maximum applied voltage of 100 V [17].…”

Section: A Preparation and Characterization Of Pzt Thin Filmmentioning

confidence: 99%

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P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

Okada

Higuchi

Kobayashi

et al. 2007

2007 IEEE Ultrasonics Symposium Proceedings

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A piezoelectric ultrasonic hydrophone array was fabricated using epitaxial lead zirconate titanate, Pb(Zr x , Ti 1-x )O 3 (PZT) thin film grown on epitaxial SrRuO 3 /Pt/ -Al 2 O 3 /Si substrates. PZT film with 3 µm in thickness was prepared by solgel method. An experimental ultrasonic hydrophone array measurement system, a one dimensional (1-D) array of 10 elements and a two dimensional (2-D) array of 4 x 4 elements have been developed to evaluate the hydrophone array system performance. In this paper, we describe the fabrication process of the hydrophone arrays and the data acquisition system. The beam direction was estimated and the B-mode image was reconstructed to evaluate the array sensitivity. The potential applications for this hydrophone array are discussed.

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Section: Hydrophone Arraymentioning

confidence: 99%

Section: A Preparation and Characterization Of Pzt Thin Filmmentioning

confidence: 99%

P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

Okada

Higuchi

Kobayashi

et al. 2007

2007 IEEE Ultrasonics Symposium Proceedings

Self Cite

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Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL₂O₃/SI Substrates for Smart Devices

Cited by 1 publication

References 5 publications

P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

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Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL2O3/SI Substrates for Smart Devices

Cited by 1 publication

References 5 publications

P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

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Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL₂O₃/SI Substrates for Smart Devices