Miniature Stress Test of Miniature Components Based on Piezoresistive Stress Sensors Test Circuit

Abstract

In this work, piezoresistive stress sensors test circuit fabricated into the sensitive structure as part of the normal processing procedure is used to measure the stresses difference distribution before and after the assembly. Sensor resistances were recorded before and after the adhesive bonding. Using the theoretical equations, the stresses on the die surface have been calculated from the data of sensor resistances. This technology not only provides a performance diagnostic tool for the sensitive structures and the miniature components, but also presents a design tool for low-stress micro-assemblies of miniature components.

On chip micro stress test circuit for miniature component

“…The schematic example of the piezoresistors' arrangements of the sensing elements on the micro part is shown in Figure 3. The detailed fabrication processes were described in reference [17] . …”