Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO&lt;inf&gt;3&lt;/inf&gt;/Pt/&amp;#x00B3;-Al&lt;inf&gt;2&lt;/inf&gt;O&lt;inf&gt;3&lt;/inf&gt;/Si structure

Akai, Daisuke; Yogi, Takahiro; Kamja, Ikuo; Numata, Yasuyuki; Ozaki, Katsuya; Sawada, Kazuaki; Okada, Nagaya; Higuchi, Kazuki; Ishida, M.

doi:10.1109/transducers.2011.5969159

Cited by 9 publications

(6 citation statements)

References 7 publications

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“…2D-pMUT-array with 100-micron diameter circular elements were placed into 64 channels (8 * 8) with a pitch of 150-micron. 2D acoustic images of the acrylic target was obtained using the array [66].…”

Section: Historical Development Of Pmut'smentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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pMUT (piezoelectric Micromachined Ultrasound Transducer) devices are an alternative that can overcome the limitations associated with conventional ultrasound transducers. pMUT’s are reported for many applications such as range-finding, biometrics, and ultrasound imaging. However, pulse-echo measurements from fabricated pMUT devices/arrays are not commonly reported in literature, a reason being lack of desirable performance either in transmit or receive mode of operation. There is also limited information about the design, fabrication and characterization of 2D-pMUT-arrays operating at high frequencies (>15 MHz) in water medium. In this paper we review ‘state-of-the-art’ for pMUT-array based medical ultrasound imaging, with a focus on their pulse-echo imaging capability. Over the next 3-5 years, we expect further improvement in piezoelectric thin film deposition techniques, on-chip integration of pre-amplification circuits and further miniaturization of pMUT devices, thus paving the way for development of pMUT-array based high frequency medical imaging systems.

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Section: Historical Development Of Pmut'smentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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“…Another route to define the diaphragm cavity is carried out by etching the Si substrate through the membrane from the front surface [ 43 , 44 ]. Figure 7 shows the schematic of fabrication process flow for PMUTs with the release of circular diaphragms from the front-side.…”

Section: Piezoelectric Materials and Fabrication Techniques For Pmutmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

Birjis

Swaminathan

Nazemi

et al. 2022

Sensors

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With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

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“…The linear array scanning B-scan ultrasonography system currently used for medical detection is generally bulky and cannot meet the detection imaging of micro-scale biometrics. At present, the micro-transducers used for micro-structure detection are mainly micro-electromechanical ultrasonic transducers (MUTs) with a compliant membrane structure [3,4], including capacitive micromachined ultrasonic transducers (cMUTs) and piezoelectric micromachined ultrasonic transducers (pMUTs) [5,6]. MUTs mainly use silicon-based ultrasonic transducer array technology prepared by MEMS technology [7], and their working mode bends the vibrations of the piezoelectric transducer.…”

Section: Introductionmentioning

confidence: 99%

A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

Jiang

Liu

Wang

et al. 2019

Sensors

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In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well.

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Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO<inf>3</inf>/Pt/³-Al<inf>2</inf>O<inf>3</inf>/Si structure

Cited by 9 publications

References 7 publications

Review of pMUTs for medical imaging: towards high frequency arrays

Review of pMUTs for medical imaging: towards high frequency arrays

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

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