Miniaturisation of Photoacoustic Sensing Systems Using MEMS Transducer Arrays and MEMS Scanning Mirrors

Kusch, Jonas; Flockhart, Gordon M. H.; Bauer, Ralf; Uttamchandani, Deepak

doi:10.1109/icsens.2018.8589899

Cited by 1 publication

(1 citation statement)

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“…In spite of the reduced dimensions of most of these motorized stages (on the order of tens/hundreds of millimeters), they are still too large to be incorporated into highly miniaturized probes, and their scanning speed is reduced. These limitations can be overcome through the use of microelectromechanical systems (MEMS) moving platforms, such as those pictured in Figure 21 , that have their dimensions extremely reduced, which is favorable for integration in miniature ultrasound probes [ 163 , 164 , 165 , 166 , 167 , 168 ].…”

Section: Characterizationmentioning

confidence: 99%

A Comprehensive Review on Photoacoustic-Based Devices for Biomedical Applications

Barbosa

Mendes

2022

Sensors

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The photoacoustic effect is an emerging technology that has sparked significant interest in the research field since an acoustic wave can be produced simply by the incidence of light on a material or tissue. This phenomenon has been extensively investigated, not only to perform photoacoustic imaging but also to develop highly miniaturized ultrasound probes that can provide biologically meaningful information. Therefore, this review aims to outline the materials and their fabrication process that can be employed as photoacoustic targets, both biological and non-biological, and report the main components’ features to achieve a certain performance. When designing a device, it is of utmost importance to model it at an early stage for a deeper understanding and to ease the optimization process. As such, throughout this article, the different methods already implemented to model the photoacoustic effect are introduced, as well as the advantages and drawbacks inherent in each approach. However, some remaining challenges are still faced when developing such a system regarding its fabrication, modeling, and characterization, which are also discussed.

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Section: Characterizationmentioning

confidence: 99%

A Comprehensive Review on Photoacoustic-Based Devices for Biomedical Applications

Barbosa

Mendes

2022

Sensors

View full text Add to dashboard Cite

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Miniaturisation of Photoacoustic Sensing Systems Using MEMS Transducer Arrays and MEMS Scanning Mirrors

Abstract: A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high pulse repetition rate MEMS Q-switched Nd:YAG laser.

Cited by 1 publication

References 12 publications

A Comprehensive Review on Photoacoustic-Based Devices for Biomedical Applications

A Comprehensive Review on Photoacoustic-Based Devices for Biomedical Applications

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