Miniaturized fuel cells based on microsystem technologies

Mex, L.; Ponath, N.; Müller, Jörg

doi:10.1016/s1464-2859(01)80641-6

Cited by 28 publications

(12 citation statements)

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“…More recently, Mex et al deposited tetrafluoroethylene/vinylphosphonic acid and tetrafluoroethylene/ H 2 O plasma polymers. These films showed surprisingly good conductivities, higher than that of Nafion , both at 30 C and at higher temperatures [15,16].…”

Section: Introductionmentioning

confidence: 92%

Plasma‐Polymerised Proton Conductive Membranes for a Miniaturised PEMFC

Mahdjoub

Roualdès²,

Sistat

et al. 2005

Fuel Cells

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Thin films, containing fluorocarbons and sulphonic acid groups, were prepared by plasma polymerisation of 1,3‐butadiene/CF3SO3H and styrene/CF3SO3H mixtures using two different types of plasma discharges. The morphology, density, and chemical composition of the synthesised plasma polymers were examined by SEM, small‐angle X‐ray reflectometry, and FTIR and XPS analyses, respectively. Proton conductivity was measured with electrochemical impedance spectroscopy. The prepared films are relatively uniform and free from defects. Plasma materials exhibiting higher sulphonic acid group contents and lower densities are those formed, from the styrene/CF3SO3H mixture, in the after glow discharge configuration; which proves that the kind of discharge and the nature of the monomer mixture have a large influence on the microstructure of plasma materials. Consequently, plasma films, prepared in the after glow discharge from the styrene/CF3SO3H mixture, show proton conductivities (up to 9.8 × 10–2 mS cm–1) about one order of magnitude higher than films prepared in the glow discharge (up to 2.2 × 10–3 mS cm–1 and 2.5 × 10–3 mS cm–1 for films prepared from 1,3‐butadiene/CF3SO3H and styrene/CF3SO3H mixtures, respectively). When compared to the commercially available Nafion®, the reference electrolyte polymer in the PEMFC, our most competitive plasma polymers are intrinsically 100 times less conductive. Nevertheless, due to their thinness (about 1 μm), these plasma films show specific resistances (about 1.0 Ω cm2), which are lower than that of the Nafion® membrane (1.9 Ω cm2 specific resistance). This explains their potential significance as polymer electrolyte membranes in a miniaturised PEMFC.

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Section: Introductionmentioning

confidence: 92%

Plasma‐Polymerised Proton Conductive Membranes for a Miniaturised PEMFC

Mahdjoub

Roualdès²,

Sistat

et al. 2005

Fuel Cells

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“…One way of study is the preparation of ionically conductive thin films by plasma deposition. Materials prepared by plasma-enhanced chemical vapor deposition (PECVD) are thin, dense, amorphous, and compatible with microelectronics [2][3][4][5]. This work will focus on a PECVD acid thin film for microfuel cells, where the acid of the film is a fluorocarboxylic acid (...-CF 2 -COOH).…”

Section: Introductionmentioning

confidence: 99%

Effect of elaboration parameters on ionic conductivity for PECVD fuel cell electrolyte

Van‐Jodin

Martin

Gaillard

2007

Ionics

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Integration of fuel cells for nomad applications (like cell phone or notebook) is characterized by small dimensions and high performances of the component. To obtain theses properties, one of possibilities is to increase the active surface with patterned substrate. Then, the actual planar batteries must be replaced by 3D batteries. Most of deposition methods, used in the actual fuel cell process flow, are not compatible with the 3D deposition because they did not provide conformal coating. That is why we develop a PECVD electrolyte because this method is known to be compatible with 3D depositions. The PECVD electrolyte is based on a fluorocarboxylic acid, which is able to conduct protons. The obtained layer is a protonic conductor that can absorb water and stop hydrogen. Effects of elaboration parameters like pressure, power, or acid concentration on the ionic conductivity will be presented.

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“…In this regard, plasma polymer films prepared in glow discharge were found to have considerably lower conductivities than those prepared in afterglow discharges (under soft plasma conditions). [120] However, most of the results (except those of Mex [132] ) indicate that, in general, ionic conductivities of films prepared by PECVD are much smaller than that of Nafion. In any case, the lower conductivity of plasma-deposited membranes is compensated by their difference in thickness.…”

Section: Fuel Cell Materialsmentioning

confidence: 99%

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

Gordillo‐Vázquez¹,

Herrero²,

Tanarro³

2007

Chemical Vapor Deposition

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Low-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.

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Miniaturized fuel cells based on microsystem technologies

Cited by 28 publications

References 0 publications

Plasma‐Polymerised Proton Conductive Membranes for a Miniaturised PEMFC

Plasma‐Polymerised Proton Conductive Membranes for a Miniaturised PEMFC

Effect of elaboration parameters on ionic conductivity for PECVD fuel cell electrolyte

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

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