Miniaturized nonincremental interferometric fiber-optic distance sensor for turning process monitoring

Dreier, Florian; Günther, Philipp; Pfister, Thorsten; Czarske, Jürgen

doi:10.1117/1.oe.51.1.014402

Cited by 5 publications

(3 citation statements)

References 13 publications

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“…With regard to surfaces, the F-LDDS was applied to measure blade vibrations and tip clearance of a turbine rotor at surface speeds above 600 m s −1 simultaneously [15], with a total position uncertainty of 20 µm due to the speckle effect. Furthermore, the F-LDDS was applied in a turning lathe to measure the shape of a workpiece in-process [16]. By averaging the surface velocity, a minimum uncertainty for the mean diameter of 1.6 µm was achieved.…”

Section: State Of the Artmentioning

confidence: 99%

Multiple wavelength interferometry for distance measurements of moving objects with nanometer uncertainty

Kuschmierz

Czarske

Fischer

2014

Meas. Sci. Technol.

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Optical measurement techniques offer great opportunities in diverse applications, such as lathe monitoring and microfluidics. Doppler-based interferometric techniques enable simultaneous measurement of the lateral velocity and axial distance of a moving object. However, there is a complementarity between the unambiguous axial measurement range and the uncertainty of the distance. Therefore, we present an extended sensor setup, which provides an unambiguous axial measurement range of 1 mm while achieving uncertainties below 100 nm. Measurements at a calibration system are performed. When using a pinhole for emulating a single scattering particle, the tumbling motion of the rotating object is resolved with a distance uncertainty of 50 nm. For measurements at the rough surface, the distance uncertainty amounts to 280 nm due to a lower signal-to-noise ratio. Both experimental results are close to the respective Cramér–Rao bound, which is derived analytically for both surface and single particle measurements.

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Section: State Of the Artmentioning

confidence: 99%

Multiple wavelength interferometry for distance measurements of moving objects with nanometer uncertainty

Kuschmierz

Czarske

Fischer

2014

Meas. Sci. Technol.

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“…Therefore, no a-priori knowledge of the distance between sensor and rotation center of the measurement object is necessary. From the mean surface velocity <v> and the mean rotational speed <f rot >, the mean absolute radius <R> was calculated by [8]…”

Section: Shape Measurementmentioning

confidence: 99%

2.3 - Precise shape measurements of rotating workpieces by a single optical sensor

Kuschmierz¹,

Günther²,

Czarske³

2013

Proceedings OPTO 2013

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“…In order to achieve a fast and contactless measurement of surface profiles on the micro-and nanoscale, optical point sensors are combined with appropriate scan axes [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Modeling of fiber-coupled confocal and interferometric confocal distance sensors

Siebert

Hagemeier

Pahl

et al. 2022

Meas. Sci. Technol.

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Laser distance sensors are a widespread, fast and contactless approach for distance and surface topography measurements. Main characteristics of those sensors are given by resolution, measurement speed and geometry of sensor. With decreasing sensor size, the alignment of the optical components in sensor setup becomes more challenging. The depth response of optical profilers is analyzed to obtain characteristic parameters and, thus, to value the alignment and the transfer behavior of those sensors. We present a novel miniaturized sensor setup comprising of confocal and interferometric confocal signals within one sensor in order to compare both principles simply by obscuring the reference arm by an absorber. Further, we introduce a theoretical signal modeling in order to analyze influences such as spatial coherence, Gaussian beam characteristics and tilted reflectors on depth response signals. In addition to this, we show that the coherent superposition significantly reduces the axial resolution due to the confocal effect in interferometric signals compared to simple confocal signals in measurement and simulation results. Finally, an appropriate fit function is presented, in order to figure out characteristic sensor parameters from the depth response signal obtained based on analysis. In this context, a good agreement to simulated and measured signals is achieved.

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Miniaturized nonincremental interferometric fiber-optic distance sensor for turning process monitoring

Cited by 5 publications

References 13 publications

Multiple wavelength interferometry for distance measurements of moving objects with nanometer uncertainty

Multiple wavelength interferometry for distance measurements of moving objects with nanometer uncertainty

2.3 - Precise shape measurements of rotating workpieces by a single optical sensor

Modeling of fiber-coupled confocal and interferometric confocal distance sensors

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