Miniaturized suspension structure for precise flying height positioning measurement using a swing arm actuator with a holographic optical element module sensor

Chou, Po Chien; Lin, Yu Cheng; Cheng, Stone

doi:10.1117/1.3549259

Cited by 2 publications

(2 citation statements)

References 24 publications

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“…A commercial OPU (TOP1100S, Topray Technologies) is used in our detection device. Inside the OPU, a voice coil motor (VCM) can be used to move the objective lens in Z-and X-axis directions [29] for fine adjustment of the readout focal point. In our device, the X-axis movement of the VCM is used to scan the sample surface in the radial direction.…”

Section: Modification Of the Opumentioning

confidence: 99%

High-performance spinning device for DVD-based micromechanical signal transduction

Hwu

Chen

Bosco

et al. 2013

J. Micromech. Microeng.

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Here we report a high-throughput spinning device for nanometric scale measurements of microstructures with instrumentation details and experimental results. The readout technology implemented in the designed disc-like device is based on a DVD data storage optical pick-up unit (OPU). With a spinning mechanism, this device can simultaneously measure surface topography, mechanical deflections and resonance frequencies of several microfabricated beams at a high speed. In biochemical sensing applications, the OPU can measure bending changes of functionalized microcantilevers, providing a statistically robust and label-free bio-detection analysis of multiple compounds. The signal-to-noise ratio (S/N) is demonstrated from statistical measurements as 1.2 with arginine detection at 750 nM concentration. Practically, the OPU can measure up to 480 individual cantilever sensors per second with nanometer resolution. The opto-mechanical optimization of the device design and settings for biochemical detection are described.

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Section: Modification Of the Opumentioning

confidence: 99%

High-performance spinning device for DVD-based micromechanical signal transduction

Hwu

Chen

Bosco

et al. 2013

J. Micromech. Microeng.

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“…Shih et al also proposed a system assembly method for precisely aligning components by using virtual images of the photodetector (PD) and laser from the HOE diffraction. Based on the design configuration, there have been a series of studies presented to fulfill and strengthen its feasibility, such as the micro blue-light objective lens with the numerical aperture (NA) of 0.65 [12], the dual-stage seesaw-swivel actuator [13][14][15][16], the astigmatic reflector [17], and the fabrication using microelectromechanical systems (MEMS) technologies [18,19]. The servo characteristics of the design have been successfully verified by Hou et al [20][21][22] for the red-light system and by Lin et al [23] for the blue-light system, respectively.…”

Section: Introductionmentioning

confidence: 99%

Prism-type holographic optical element design and verification for the blue-light small-form-factor optical pickup head

Shih

Chiu²,

Cheng³

et al. 2012

Appl. Opt.

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This paper presents the prism-type holographic optical element (PT-HOE) design for a small-form-factor (SFF) optical pickup head (OPH). The surface of the PT-HOE was simulated by three steps of optimization and generated by binary optics. Its grating pattern was fabricated on the inclined plane of a microprism by using the standard photolithography and specific dicing procedures. The optical characteristics of the device were verified. Based on the virtual image method, the SFF-OPH with the device was assembled and realized.

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Miniaturized suspension structure for precise flying height positioning measurement using a swing arm actuator with a holographic optical element module sensor

Cited by 2 publications

References 24 publications

High-performance spinning device for DVD-based micromechanical signal transduction

High-performance spinning device for DVD-based micromechanical signal transduction

Prism-type holographic optical element design and verification for the blue-light small-form-factor optical pickup head

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