Mirror design for long-wavelength vertical-cavity surface-emitting lasers

Abstract

A kind of bottom mirror, fabricated using a nano-scale epitaxy method, is proposed for long-wavelength InP-based vertical-cavity surface-emitting lasers (VCSELs). The design of the bottom mirror combines the conventional dielectric distributed Bragg reflector structure with a fabrication procedure using nano-scale epitaxial lateral overgrowth (ELO). Hence, this ELO mirror structure can provide both a high reflectivity, to form an optical resonance cavity, and a virtual InP substrate for the growth of high quality active regions in the VCSEL. The dependence of the reflectivity on the epitaxial lateral overgrowth mirror structure parameters is analyzed in detail using numerical methods. The results demonstrate that a stopband at more than 99% reflectivity is achieved in the wavelength range from 1.49 to 2.09 µm, and the threshold optical gain can be as low as 202, 257, and 311 cm−1 for the internal loss coefficients of 10, 15 and 20 cm−1.